[摘要]：A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with similar to 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3701163]
