[摘要]：Interfaces of Ni/Cu multilayers were studied by atom probe tomography. To this aim, specimens with sharp or artificially smeared interfaces were prepared and investigated before and after annealing at 773 K. Owing to three-dimensional subnanometer resolution of the atom probe, local chemical analysis of layer interfaces becomes possible without interferences of grain boundaries or geometric roughness. In contrast to the classical expectation for a miscible system, but in agreement with more recent theoretical considerations, diffusion reduces the chemical width of the interfaces by up to 50%. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3658390]
