Local charge transport in nanoscale amorphous and crystalline regions of high-k (Zr0(2))(0.8)(Al2O3)(0.2) thin films

[摘要]：The charge transport in (Zr0(2))(0.8)(Al2O3)(0.2) thin films consisting of nanoscale crystallites in an amorphous matrix were investigated by conductive atomic force microscopy. Local current-voltage curves were obtained either from multiple current image

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