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Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness

  作者 Yoneoka, S; Lee, J; Liger, M; Yama, G; Kodama, T; Gunji, M; Provine, J; Howe, RT; Goodson, KE; Kennyt, TW  
  选自 期刊  Nano Letters;  卷期  2012年12-2;  页码  683-686  
  关联知识点  
 

[摘要]While the literature is rich with data for the electrical behavior of nanotransistors based on semiconductor nanowires and carbon nanotubes, few data are available for ultrascaled metal interconnects that will be demanded by these devices. Atomic layer de

 
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