Characterization of room temperature metal microbolometers near the metal-insulator transition regime for scanning thermal microscopy

[摘要]：Metal microbolometers, used in scanning thermal microscopy, were microfabricated from <20 nm titanium thin films on SiO2/Si3N4/SiO2 cantilevers. These thin films are near the metal-insulator transition regime such that as the film thickness decreases-the

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