Templated Solid-State Dewetting to Controllably Produce Complex Patterns

[摘要]：Templated formation of complex patterns via solid-state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid-state dewetting of epitaxial films can be templated through lithographic pre-patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.

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