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[摘要]：Hybrid-integration of (111), (110), and (100) Ge-on-insulator (GOI) on an Si chip is essential to merge III-V semiconductor optical-devices as well as high-speed Ge transistors onto Si-large-scale integrated-circuits. We clarify important-parameters to control Ni-metal-induced lateral crystallization and Al-induced layer-exchange crystallization. This achieves artificial (110) and (111) Si micro-seed on insulating-film. Together with Si substrate as (100) Si seed, multi-crystal-seeds with different orientations are aligned on a Si chip. Then, SiGe-mixing triggered rapid-melting-growth of amorphous-Ge is examined from these multi-crystal-seeds. This enables simultaneous Ge lateral-crystallization with (111), (110), and (100) orientations. High-quality, hybrid-orientation GOIs without defects are demonstrated on Si platform. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4705733] |
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