Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining - art. no. 042001

[摘要]：We present a two-axis micro-mirror scanner with compact slanted comb-drive actuator. The slanted comb-drive actuator is analyzed by comparing with a rectangular comb-drive actuator. The angle magnification factor of slanted comb-drive actuator is 1.6 time

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