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Controlled formation of atomic step morphology on micropatterned Si (100) - art. no. 041806

  作者 Li, K; Pradeep, N; Chikkamaranahalli, S; Stan, G; Attota, R; Fu, J; Silver, R  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-4;  页码  41806-41806  
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[摘要]Micrometer scale features are fabricated on Si (100) surfaces using lithographic techniques and thermally processed in an ultrahigh vacuum (UHV) environment. The process results in the formation of symmetric, step-terrace patterns with wide atomically fla

 
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