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[摘要]：The velocities of Ar(+) and Xe(+) ions near the presheath-sheath boundary in an Ar/Xe discharge are studied by particle-in-cell Monte Carlo simulation. For a pure argon discharge the argon ion has almost the same velocity profile as it does in the mixture of argon and xenon. Similarly, for a xenon discharge the xenon ion has almost the same velocity profile as it does in the mixture of argon and xenon. The ion speed at the sheath-presheath boundary is the same for an ion in a pure argon or xenon discharge and for the same ion in a mixture of argon and xenon. We conclude that, in our simulation, each ion reaches its own Bohm speed at the presheath-sheath interface. |
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