In situ investigation of the shrinkage of photopolymerized micro/nanostructures: the effect of the drying process

[摘要]：We report on experimental study of the shrinkage of photopolymerized micro/nanostructures fabricated by femto-second direct laser writing in organic-inorganic resists. Blueshift of the stop-band positions of fabricated photonic crystals during the drying process, which follows the development and rinsing stages, indicates that the drying process plays an important role in the formation of the shrinkage. It is further confirmed that the shrinkage almost completely occurs during the drying process by in situ optical monitoring the structures. These findings will help to better understand, control, and even positively utilize the shrinkage in the applications of the photopolymerization-based direct laser writing technique. (C) 2012 Optical Society of America

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