Fully front-side bulk-micromachined single-chip micro flow sensors for bare-chip SMT (surface mounting technology) packaging - art. no. 035020

[摘要]：This paper reports novel single-wafer-based piezoresistive micro flow sensors, which are bulk micromachined only from the front side of the silicon wafer to facilitate the sensor-bare chips directly packaged into micro-fluidic systems with low-cost surfac

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