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Evaluation of long carrier lifetimes in thick 4H silicon carbide epitaxial layers

  作者 Miyazawa, T; Ito, M; Tsuchida, H  
  选自 期刊  Applied Physics Letters;  卷期  2010年97-20;  页码  202106-202106  
  关联知识点  
 

[摘要]The carrier lifetime of similar to 265 mu m thick n-type 4H silicon carbide epilayers prepared using the carbon-implantation/annealing method was evaluated. An extraordinarily long minority carrier lifetime of 18.5 mu s and a high injection lifetime of 19

 
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