Monitoring fatigue damage growth in polysilicon microstructures under different loading conditions

[摘要]：Nucleation and accumulation of damage in polysilicon microstructures under fatigue loading cycles are investigated with respect to the maximum applied stress. Measurements are performed with negative load ratios on a 15 mu m thick notched MEMS specimen, w

[全文传递流程]：

一般上传文献全文的时限在1个工作日内