Piezoresistive CMOS sensor for out-of-plane normal stress

[摘要]：A piezoresistive sensor for measuring the temperature compensated sum (sigma(xx) + sigma(yy))/2 - beta sigma(zz) of the three mechanical normal stress components, where sigma(xx) + sigma(yy), sigma(zz), and beta denote the in-plane normal stress sum, the

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