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  • Microscaled and nanoscaled platinum sensors
    [作者:Rajagopal, A; Walavalkar, S; Chen, S; Guo, L; Gwinn, T; Scherer, A,期刊:Applied Physics Letters, 页码:133109-133109 , 文章类型: Article,,卷期:2010年97-13]
  • We show small and robust platinum resistive heaters and thermometers that are defined by microlithography on silicon substrates. These devices can be used for a wide range of applications, including thermal sensor arrays...