- Electric double layer effect in a nano-scale SiO2 sacrificial layer etching process and its application in nanowire fabrication
[作者:Gong, YB; Dai, PF; Gao, AR; Li, T; Zhou, P; Wang, YL,期刊:Journal of Micromechanics and Microengineering, 页码:105021-105021 , 文章类型: Article,,卷期:2010年20-10]
- Process controllability has become one of the key factors for utilizing micro-scale processes in nanofabrication. Sacrificial layer technology especially should be carefully handled to avoid excessive etching of nano-sca...
- Design and simulation of advanced charge recovery piezoactuator drivers
[作者:Biancuzzi, G; Lemke, T; Woias, P; Ruthmann, O; Schrag, HJ; Vodermayer, B; Schmid, T; Goldschmidtboeing, F,期刊:Journal of Micromechanics and Microengineering, 页码:105022-105022 , 文章类型: Article,,卷期:2010年20-10]
- The German Artificial Sphincter System project aims at the development of an implantable sphincter prosthesis driven by a piezoelectrically actuated micropump. The system has been designed to be fully implantable, i.e. t...
- Modeling and characterization of MEMS-based piezoelectric harvesting devices
[作者:Kamel, TM; Elfrink, R; Renaud, M; Hohlfeld, D; Goedbloed, M; de Nooijer, C; Jambunathan, M; van Schaijk, R,期刊:Journal of Micromechanics and Microengineering, 页码:105023-105023 , 文章类型: Article,,卷期:2010年20-10]
- Vibrational piezoelectric harvesting devices (PHD) provide an autonomous power source for various types of sensors, actuators and MEMS devices. There have been several examples of vibrational energy harvesters published ...
- Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method
[作者:Sadeghian, H; Yang, CK; Gavan, KB; Goosen, JFL; van der Drift, EWJM; van der Zant, HSJ; Bossche, A; French, PJ; van Keulen, F,期刊:Journal of Micromechanics and Microengineering, 页码:105027-105027 , 文章类型: Article,,卷期:2010年20-10]
- Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the...
- Contact degradation in hot/cold operation of direct contact micro-switches
[作者:Yang, Z; Lichtenwalner, D; Morris, A; Krim, J; Kingon, AI,期刊:Journal of Micromechanics and Microengineering, 页码:105028-105028 , 文章类型: Article,,卷期:2010年20-10]
- Degradation of gold contacts in micro-switches was studied under an extensive range of operation conditions including high-electric-field ac/dc hot switching, low-electric-field hot switching and cold switching. Tests we...
- Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching
[作者:Zhang, XY; Li, H; Liu, K; Luo, J; Xie, CS; Ji, A; Zhang, TX,期刊:Journal of Micromechanics and Microengineering, 页码:105029-105029 , 文章类型: Article,,卷期:2010年20-10]
- A diffractive microlens with a cascade focal plane along the main optical axis of the device is fabricated using a low-cost technique mainly including single mask ultraviolet (UV) photolithography and dual-step KOH:H2O e...
- Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system
[作者:Elfrink, R; Renaud, M; Kamel, TM; de Nooijer, C; Jambunathan, M; Goedbloed, M; Hohlfeld, D; Matova, S; Pop, V; Caballero, L; van Schaijk, R,期刊:Journal of Micromechanics and Microengineering, 页码:104001-104001 , 文章类型: Proceedings Paper,,卷期:2010年20-10]
- This paper describes the characterization of thin-film MEMS vibration energy harvesters based on aluminum nitride as piezoelectric material. A record output power of 85 mu W is measured. The parasitic-damping and the ene...
- A batch process micromachined thermoelectric energy harvester: fabrication and characterization
[作者:Su, J; Leonov, V; Goedbloed, M; van Andel, Y; de Nooijer, MC; Elfrink, R; Wang, Z; Vullers, RJM,期刊:Journal of Micromechanics and Microengineering, 页码:104005-104005 , 文章类型: Proceedings Paper,,卷期:2010年20-10]
- Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e. g., the human body. They can be used for powering ...
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