- A frameless eddy current sensor for cryogenic displacement measurement
[作者:Wang, P; Fu, ZB; Ding, TH,期刊:Sensors And Actuators A-Physical, 页码:7-11 , 文章类型: Article,,卷期:2010年159-1]
- This paper presents a frameless eddy current sensor for cryogenic displacement measurement, for instance, the monitoring of axial displacement in liquid propellant engine. The frameless sensor probe, which consists of fl...
- In situ MEMS gradiometer with nanometer-resolution optical detection system
[作者:Campanella, H; del Real, RP; Duch, M; Serre, C; Lucas, I; De Manuel, V; Guerrero, H; Esteve, J; Diaz-Michelena, M; Plaza, JA,期刊:Sensors And Actuators A-Physical, 页码:33-40 , 文章类型: Article,,卷期:2010年159-1]
- Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the d...
- Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor
[作者:Loui, A; Sirbuly, DJ; Elhadj, S; McCall, SK; Hart, BR; Ratto, TV,期刊:Sensors And Actuators A-Physical, 页码:58-63 , 文章类型: Article,,卷期:2010年159-1]
- A new method for detecting and discriminating pure gases and binary mixtures has been investigated. This approach is based on two distinct physical mechanisms which can be simultaneously employed within a single microcan...
- Octree-search Kinetic Monte Carlo
[作者:Gosalvez, MA; Xing, Y; Sato, K; Nieminen, RM,期刊:Sensors And Actuators A-Physical, 页码:64-68 , 文章类型: Article,,卷期:2010年159-1]
- We present a Kinetic Monte Carlo (KMC) method based on an octree data representation and search algorithm for the simulation of complex Micro Electro Mechanical Systems (MEMS) structures and, in general, complex, multi-v...
- Effects of residual stresses on lead-zirconate-titanate (PZT) thin-film membrane microactuators
[作者:Lee, CC; Cao, GZ; Shen, IY,期刊:Sensors And Actuators A-Physical, 页码:88-95 , 文章类型: Article,,卷期:2010年159-1]
- A common design of piezoelectric microactuators adopts a membrane structure that consists of a base silicon structure, a layer of bottom electrode, a layer of piezoelectric thin film, and a layer of top electrode. In par...
- Design and fabrication of flexible piezo-microgenerator by depositing ZnO thin films on PET substrates
[作者:Pan, CT; Liu, ZH; Chen, YC; Liu, CF,期刊:Sensors And Actuators A-Physical, 页码:96-104 , 文章类型: Article,,卷期:2010年159-1]
- In this study, a new design of PET-based (polyethylene terephthalate) flexible power harvesting system is proposed. It consists of flexible PET vibration substrate, piezoelectric ZnO (zinc oxide) thin film, design of lum...
- Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications
[作者:Sharma, G; Liljeholm, L; Enlund, J; Bjurstrom, J; Katardjiev, I; Hjort, K,期刊:Sensors And Actuators A-Physical, 页码:111-116 , 文章类型: Article,,卷期:2010年159-1]
- A shear mode AlN solidly mounted resonator (SMR) microfluidic sensor system was fabricated and characterized. The AlN SMR fabrication process is fully IC compatible and uses reactive sputtering to deposit piezoelectric A...
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