- Continuous particle separation in a serpentine microchannel via negative and positive dielectrophoretic focusing
[作者:Church, C; Zhu, JJ; Nieto, J; Keten, G; Ibarra, E; Xuan, XC,期刊:Journal of Micromechanics and Microengineering, 页码:65011-65011 , 文章类型: Article,,卷期:2010年20-6]
- Dielectrophoresis (DEP) has been widely used to focus and separate cells and particles in microfluidic devices. This work first demonstrates negative and positive dielectrophoretic focusing of particles in a serpentine m...
- Reduction of surface roughness for optical quality microfluidic devices in PMMA and COC
[作者:Ogilvie, IRG; Sieben, VJ; Floquet, CFA; Zmijan, R; Mowlem, MC; Morgan, H,期刊:Journal of Micromechanics and Microengineering, 页码:65016-65016 , 文章类型: Article,,卷期:2010年20-6]
- A rapid and low-cost technique is presented for the fabrication of optical quality microfluidic devices in poly(methyl methacrylate) (PMMA) or cyclic olefin copolymer (COC). When polymer microfluidic devices are manufact...
- Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining
[作者:Tang, B; Shikida, M; Sato, K; Pal, P; Amakawa, H; Hida, H; Fukuzawa, K,期刊:Journal of Micromechanics and Microengineering, 页码:65008-65008 , 文章类型: Article,,卷期:2010年20-6]
- In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemi...
- Self-assembly of (sub-)micron particles into supermaterials
[作者:Elwenspoek, M; Abelmann, L; Berenschot, E; van Honschoten, J; Jansen, H; Tas, N,期刊:Journal of Micromechanics and Microengineering, 页码:64001-64001 , 文章类型: Proceedings Paper,,卷期:2010年20-6]
- We review aspects of static self-assembly with regard to the synthesizing of new types of three-dimensional materials made of specifically designed particles in the 100 nm to 10 mu m range. Mechanical interconnection tec...
- Zero-level packaging of MEMS in standard CMOS technology
[作者:Marigo, E; Lopez, JL; Murillo, G; Torres, F; Giner, J; Uranga, A; Abadal, G; Esteve, J; Barniol, N,期刊:Journal of Micromechanics and Microengineering, 页码:64009-64009 , 文章类型: Proceedings Paper,,卷期:2010年20-6]
- A novel technique for global packaging of MEMS devices using standard CMOS technology is presented. A MEMS polysilicon resonator is fabricated and on-chip packaged using two metal layers already available from the CMOS t...
- Experimental verification of temperature coefficients of resistance for uniformly doped P-type resistors in SOI
[作者:Olszacki, M; Maj, C; Al Bahri, M; Marrot, JC; Boukabache, A; Pons, P; Napieralski, A,期刊:Journal of Micromechanics and Microengineering, 页码:64008-64008 , 文章类型: Proceedings Paper,,卷期:2010年20-6]
- Many today's microsystems like strain-gauge-based piezoresistive pressure sensors contain doped resistors. If one wants to predict correctly the temperature impact on the performance of such devices, the accurate data ab...
- Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications
[作者:Sokmen, U; Stranz, A; Waag, A; Ababneh, A; Seidel, H; Schmid, U; Peiner, E,期刊:Journal of Micromechanics and Microengineering, 页码:64007-64007 , 文章类型: Proceedings Paper,,卷期:2010年20-6]
- We report on a micro-machined resonator for mass sensing applications which is based on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin film actuator. An inductively coupl...
- A high aspect ratio SU-8 fabrication technique for hollow microneedles for transdermal drug delivery and blood extraction
[作者:Chaudhri, BP; Ceyssens, F; De Moor, P; Van Hoof, C; Puers, R,期刊:Journal of Micromechanics and Microengineering, 页码:64006-64006 , 文章类型: Proceedings Paper,,卷期:2010年20-6]
- Protein drugs, e. g. hormonal drugs, cannot be delivered orally to a patient as they get digested in the gastro-intestinal (GI) tract. Thus, it is imperative that these kinds of drugs are delivered transdermally through ...
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