- A biomimetic piezoelectric pump: Computational and experimental characterization
[作者:de Lima, CR; Vatanabe, SL; Choi, A; Nakasone, PH; Pires, RF; Silva, ECN,期刊:Sensors And Actuators A-Physical, 页码:110-118 , 文章类型: Article,,卷期:2009年152-1]
- Flow pumps have been developed for classical applications in Engineering, and are important instruments in areas such as Biology and Medicine. Among applications for this kind of device we notice blood pump and chemical ...
- Sensitivity analysis of packaging effect of silicon-based piezoresistive pressure sensor
[作者:Chou, TL; Chu, CH; Lin, CT; Chiang, KN,期刊:Sensors And Actuators A-Physical, 页码:29-38 , 文章类型: Article,,卷期:2009年152-1]
- The silicon-based pressure sensor is one of the major applications in the MEMS device. Nowadays, the silicon piezoresistive pressure sensor is a mature technology in the industry, but its requirement in terms of sensing ...
- Analyses of vibration-based piezoelectric power generator in discontinuous operation mode
[作者:Lin, JH; Wu, XM; Chen, H; Liu, X; Ren, TL; Liu, LT,期刊:Sensors And Actuators A-Physical, 页码:48-52 , 文章类型: Article,,卷期:2009年152-1]
- Vibration energy can be converted into electrical energy using piezoelectric power generator. The electrical energy is usually collected in a storage capacitor. The storage capacitor discharges to the load only when enou...
- Anisotropic wet etching silicon tips of small opening angle in KOH solution with the additions of I-2/KI
[作者:Han, JQ; Lu, SY; Li, Q; Li, XL; Wang, JY,期刊:Sensors And Actuators A-Physical, 页码:75-79 , 文章类型: Article,,卷期:2009年152-1]
- Etching silicon tips in potassium hydroxide (KOH) solution has the advantages of simplicity. easy to handle, low-cost and homogeneous etching rate of the (100) crystal plane. But the opening angle of silicon tips etched ...
- Development of an auto test system for humidity sensors
[作者:Feng, YL; Wang, SJ; Feng, B; Wang, R; He, Y; Zhang, T,期刊:Sensors And Actuators A-Physical, 页码:104-109 , 文章类型: Article,,卷期:2009年152-1]
- Humidity sensors are fabricated on ceramic substrates with Ag-Pd interdigitated electrodes by loading ZnO nanorods as a sensing material. X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM) a...
- Stability of thin platinum films implemented in high-temperature microdevices
[作者:Tiggelaar, RM; Sanders, RGR; Groenland, AW; Gardeniers, JGE,期刊:Sensors And Actuators A-Physical, 页码:39-47 , 文章类型: Article,,卷期:2009年152-1]
- In this paper we report on Structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400-950 C. Correlations are made betw...
- Robust micro-rate sensor actuated by parametric resonance
[作者:Oropeza-Ramos, LA; Burgner, CB; Turner, KL,期刊:Sensors And Actuators A-Physical, 页码:80-87 , 文章类型: Article,,卷期:2009年152-1]
- Loss in sensitivity, commonly presented in micro-gyroscopes based on harmonic oscillators [N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, Proceedings of the IEEE 86 (8)], can be overcome by using parametr...
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