- Simultaneous measurement of thermal conductivity and interface thermal conductance of diamond thin film
[作者:Lee, B; Lee, JS; Kim, SU; Kim, K; Kwon, O; Lee, S; Kim, JH; Lim, DS,期刊:Journal Of Vacuum Science & Technology B, 页码:2408-2412 , 文章类型: Article,,卷期:2009年27-6]
- The authors developed an experimental method that can measure the in-plane thermal conductivity of a thin film and the interface thermal conductance between the film and the metal strip, simultaneously. This technique, t...
- Influence of proton irradiation on the structure and stability of poly(dimethylsiloxane) and poly(dimethylsiloxane)-nanodiamond composite
[作者:Borjanovic, V; Bistricic, L; Vlasov, I; Furic, K; Zamboni, I; Jaksic, M; Shenderova, O,期刊:Journal Of Vacuum Science & Technology B, 页码:2396-2403 , 文章类型: Article,,卷期:2009年27-6]
- In the present study, pure poly(dimethylsiloxane) (PDMS) polymer and PDMS-detonation nanodiamond (PDMS-DND) composite with 1 wt. % of DND were irradiated under vacuum at room temperature with a 2 MeV proton beam with flu...
- Influence of sputtering a ZnMgO window layer on the interface and bulk properties of Cu(In,Ga)Se-2 solar cells
[作者:Li, JV; Li, XN; Yan, YF; Jiang, CS; Metzger, WK; Repins, IL; Contreras, MA; Levi, DH,期刊:Journal Of Vacuum Science & Technology B, 页码:2384-2389 , 文章类型: Article,,卷期:2009年27-6]
- The authors studied the influence of sputtering a ZnMgO window layer for Cu(In,Ga)Se-2 solar cells on bulk and interface electrical properties. Admittance spectroscopy reveals deep levels at the ZnMgO/CdS interface whose...
- Study of low temperature growth of III-V alloys for transparent layers
[作者:Wu, L; Iyer, S; Li, J; Gibson, K; Reppert, J; Rao, AM; Matney, K; Lewis, J,期刊:Journal Of Vacuum Science & Technology B, 页码:2375-2383 , 文章类型: Article,,卷期:2009年27-6]
- The authors report on the successful growth of wide band gap III-V alloy systems on glass substrates at low growth temperatures that may be suitably exploited for the realization of novel high performance and stable opto...
- Proton irradiation effects on Sb-based heterojunction bipolar transistors
[作者:Lo, CF; Kim, HY; Kim, J; Chen, SH; Wang, SY; Chyi, JI; Chou, BY; Chen, KH; Wang, YL; Chang, CY; Pearton, SJ; Kravchenko, LI; Jang, S; Ren, F,期刊:Journal Of Vacuum Science & Technology B, 页码:L33-L37 , 文章类型: Article,,卷期:2009年27-6]
- In0.52Al0.48As/In0.39Ga0.61As0.77Sb0.23/In0.53Ga0.47As double heterojunction bipolar transistors (DHBTs) were irradiated with 5 MeV protons at fluences from 2x10(11) to 2x10(15) protons/cm(2). The radiation produced sign...
- Thermodynamically stable nanotips of Au-Mo alloy
[作者:Nomura, K; Nagao, T; Cho, BL; Katsuda, H; Matsumura, T; Oshima, C,期刊:Journal Of Vacuum Science & Technology B, 页码:2432-2434 , 文章类型: Article,,卷期:2009年27-6]
- The authors propose a simple new method for fabricating stable nanotips using sharpened Au-Mo alloy tips. By annealing at 1000-1200 K in UHV, Au atoms segregate to the alloy surface to form a Au film of one physical mono...
- Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography
[作者:Schift, H; Spreu, C; Saidani, M; Bednarzik, M; Gobrecht, J; Klukowska, A; Reuther, F; Gruetzner, G; Solak, HH,期刊:Journal Of Vacuum Science & Technology B, 页码:2846-2849 , 文章类型: Article,,卷期:2009年27-6]
- The organic-inorganic hybrid polymer Ormostamp was successfully used for the fabrication of inexpensive, transparent working stamps to be used in nanoimprint lithography. The stamps were produced from different masters b...
- Cold-developed electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates
[作者:Reinspach, J; Lindblom, M; von Hofsten, O; Bertilson, M; Hertz, HM; Holmberg, A,期刊:Journal Of Vacuum Science & Technology B, 页码:2593-2596 , 文章类型: Article,,卷期:2009年27-6]
- Cold development was applied to improve the resolution in a trilayer resist that is used for the fabrication of state-of-the-art soft x-ray microscopy zone plates. By decreasing the temperature of the hexyl acetate devel...
- Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
[作者:Guillorn, M; Chang, J; Fuller, N; Patel, J; Darnon, M; Pyzyna, A; Joseph, E; Engelmann, S; Ott, J; Newbury, J; Klaus, D; Bucchignano, J; Joshi, P; Scerbo, C; Kratschmer, E; Graham, W; To, B; Parisi, J; Zhang, Y; Haensch, W,期刊:Journal Of Vacuum Science & Technology B, 页码:2588-2592 , 文章类型: Article,,卷期:2009年27-6]
- The authors report on a hybrid lithography process that integrates electron beam lithography (EBL) and optical photolithography. To maximize resolution and density, the EBL exposure is performed using a hydrogen silsesqu...
- Fabrication of high density, high-aspect-ratio polyimide nanofilters
[作者:Makarova, OV; Tang, CM; Amstutz, P; Divan, R; Imre, A; Mancini, DC; Hoffbauer, M; Williamson, T,期刊:Journal Of Vacuum Science & Technology B, 页码:2585-2587 , 文章类型: Article,,卷期:2009年27-6]
- A novel fabrication process produces high porosity polymer nanofilters with smooth, uniform, and straight pores with high aspect ratios. The process utilizes electron beam lithography and energetic neutral atom beam lith...
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