- Miniaturization of grayscale images - art. no. 06F313
[作者:Yang, JKW; Duan, HG; Law, JBK; Low, HY; Cord, B,期刊:Journal Of Vacuum Science & Technology B, 页码:F6313-F6313 , 文章类型: Article,,卷期:2011年29-6]
- Printing of binary patterns onto substrates has been the strength of resist-based binary lithography that has advanced the semiconductor industry. When patterning grayscale structures however, grayscale-lithography proce...
|