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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共152条记录   ZnO nanostructures grown on zinc nanocones by thermal oxidation [作者：Chao, LC; Liau, CC; Lin, SJ; Lee, JW,期刊：Journal Of Vacuum Science & Technology B, 页码：2601-2603 , 文章类型： Article，,卷期：2008年26-6] ZnO nanostructures were grown on metallic zinc nanocones by thermal oxidation. The metallic nanocones are prepared by argon ion beam sputtering utilizing a capillaritron ion source. The aspect ratios of zinc nanocones ar... High-speed optical beam-steering based on phase-arrayed waveguides [作者：Jarrahi, M; Fabian, R; Pease, W; Miller, DAB; Lee, TH,期刊：Journal Of Vacuum Science & Technology B, 页码：2124-2126 , 文章类型： Article，,卷期：2008年26-6] The authors present a high-speed optical beam-steering system employing phase-arrayed waveguides. They demonstrate a 100 mrad deflection angle at the fastest ever reported instrument-limited deflection speed of 18 GHz an... Application of vector scanning in focused ion beam photomask repair system [作者：Yasaka, A; Aramaki, F; Muramatsu, M; Kozakai, T; Matsuda, O; Sugiyama, Y; Doi, T; Takaoka, O; Hagiwara, R; Nakamae, K,期刊：Journal Of Vacuum Science & Technology B, 页码：2127-2130 , 文章类型： Article，,卷期：2008年26-6] With continuous reduction in linewidth of the VLSI devices, the pattern integrity of photomasks becomes considerably more important than ever. Consequently, requirement for the defect repair technology on photomasks is m... Linewidth uniformity in Lloyd's mirror interference lithography systems [作者：O'Reilly, TB; Smith, HI,期刊：Journal Of Vacuum Science & Technology B, 页码：2131-2134 , 文章类型： Article，,卷期：2008年26-6] Control of linewidth in patterns written with interference lithography (IL) is an important part of process control for many applications, requiring an understanding of how exposure parameters, such as dose and dose modu... Spatial-frequency multiplication with multilevel interference lithography [作者：Chang, CH; Zhao, Y; Heilmann, RK; Schattenburg, ML,期刊：Journal Of Vacuum Science & Technology B, 页码：2135-2138 , 文章类型： Article，,卷期：2008年26-6] The authors present a large-area spatial-frequency multiplication fabrication process for patterning one-dimensional periodic structures using multilevel interference lithography. In this process, multiple grating levels... Scanning proximal probes for parallel imaging and lithography [作者：Ivanova, K; Sarov, Y; Ivanov, T; Frank, A; Zollner, J; Bitterlich, C; Wenzel, U; Volland, BE; Klett, S; Rangelow, IW; Zawierucha, P; Zielony, M; Gotszalk, T; Dontzov, D; Schott, W; Nikolov, N; Zier, M; Schmidt, B; Engl, W; Sulzbach, T; Kostic, I,期刊：Journal Of Vacuum Science & Technology B, 页码：2367-2373 , 文章类型： Article，,卷期：2008年26-6] Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probe... Neutral atom and molecule focusing using a Fresnel zone plate [作者：Reisinger, T; Holst, B,期刊：Journal Of Vacuum Science & Technology B, 页码：2374-2379 , 文章类型： Article，,卷期：2008年26-6] Focusing of neutral atoms and molecules has several potential applications. The very first microscopy images using helium as an imaging probe were published earlier this year. Another possible application is to study the... Quality assessment of antisticking layers for thermal nanoimprint [作者：Scheer, HC; Hafner, W; Fidler, A; Mollenbeck, S; Bogdanski, N,期刊：Journal Of Vacuum Science & Technology B, 页码：2380-2384 , 文章类型： Article，,卷期：2008年26-6] Layers from fluorinated trichlorosilanes are in widespread use for the prevention of sticking in nanoimprint. It is generally assumed that these layers are monolayers, bonded to the substrate, and internally cross-linked... Toward 1 Tdot/in.(2) nanoimprint lithography for magnetic bit-patterned media: Opportunities and challenges [作者：Yang, XM; Xu, Y; Seiler, C; Wan, L; Xiao, SG,期刊：Journal Of Vacuum Science & Technology B, 页码：2604-2610 , 文章类型： Article，,卷期：2008年26-6] Nanoimprint lithography presents unique opportunities for patterned media applications due to its advantages of sub-10 nm resolution capability, patterning of a whole disk in a single imprint step with reasonably high th... Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media [作者：Miyazaki, T; Hayashi, K; Kobayashi, K; Kuba, Y; Ohyi, H; Obara, T; Mizuta, O; Murayama, N; Tanaka, N; Kawamura, Y; Uemoto, H,期刊：Journal Of Vacuum Science & Technology B, 页码：2611-2618 , 文章类型： Article，,卷期：2008年26-6] To fabricate master templates of high-density patterned magnetic media, the authors developed a high-resolution and high-throughput rotary stage electron beam mastering system. They accomplished the fabrication of discre... Electrothermal actuation studies on silicon carbide resonators [作者：Mastropaolo, E; Cheung, R,期刊：Journal Of Vacuum Science & Technology B, 页码：2619-2623 , 文章类型： Article，,卷期：2008年26-6] The electromechanical behavior of SiC clamped-clamped beam (bridge) resonators with u-shaped aluminium (Al) electrodes on top has been studied as a function of electrode length, width, and spacing. Negative and positive ... Novel SU-8 optical waveguide microgripper for simultaneous micromanipulation and optical detection [作者：Panepucci, RR; Martinez, JA,期刊：Journal Of Vacuum Science & Technology B, 页码：2624-2627 , 文章类型： Article，,卷期：2008年26-6] A novel microgripper device structure with optical waveguides as arms is presented. The devices shown here have waveguide dimensions of 50x30 mu m(2). The device fabrication, using SU-8 polymer, is described. Its capabil... Light modulation with nanopatterned diffractive microelectromechanical system pixels [作者：Skinner, JL; Talin, AA; Horsley, DA,期刊：Journal Of Vacuum Science & Technology B, 页码：2139-2144 , 文章类型： Article，,卷期：2008年26-6] The design, fabrication, and testing of a microelectromechanical system (MEMS) optical modulator is presented. Polarization effects of noncircular holes on reflectivity are examined. Thermal nanoimprint lithography is us... Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle [作者：Kritsun, O; Lalovic, I; Rokitski, S; Partlo, B; La Fontaine, B; Farrar, N; Levinson, H,期刊：Journal Of Vacuum Science & Technology B, 页码：2145-2150 , 文章类型： Article，,卷期：2008年26-6] In this article the authors discuss the impact of coherence, or laser speckle, of current generation 193 nm argon fluoride (ArF) excimer sources on lithographic patterning. They report a new metrology capability to chara... Fabrication of metallic nanoslit waveguides with sharp bends [作者：Lu, M; Ocola, LE; Gray, SK; Wiederrecht, GP,期刊：Journal Of Vacuum Science & Technology B, 页码：2151-2155 , 文章类型： Article，,卷期：2008年26-6] Metallic nanoslit waveguides are promising candidates for ultrahigh-density optical interconnections. A variety of devices based on metallic nanoslit waveguides have already been proposed that show a great superiority ov... Optical antennas: A boost for infrared detection [作者：Li, HF; Cheng, X,期刊：Journal Of Vacuum Science & Technology B, 页码：2156-2159 , 文章类型： Article，,卷期：2008年26-6] Optical antennas that operate at infrared wavelengths are studied for their potential application in enhancing the sensitivity of infrared detectors. Huge enhancement of infrared intensity can be achieved at the gap regi...