- Magnetic soft x-ray imaging of vortex core dynamics
[作者:Mesler, BL; Buchanan, K; Im, MY; Anderson, E; Fischer, P,期刊:Journal Of Vacuum Science & Technology B, 页码:198-201 , 文章类型: Proceedings Paper,,卷期:2010年28-1]
- Soft x-ray microscopy offers high spatial and temporal resolution imaging with element specific magnetic contrast. As such, it is an ideal method for studying nanoscale spin dynamics, such as vortex core dynamics. At XM-...
- Characterization and analysis of silicon on insulator fabricated by separation by implanted oxygen layer transfer
[作者:Wei, X; Wu, AM; Wang, X; Li, XY; Ye, F; Chen, J; Chen, M; Zhang, B; Li, CL; Zhang, M; Wang, X,期刊:Journal Of Vacuum Science & Technology B, 页码:163-168 , 文章类型: Article,,卷期:2010年28-1]
- In this article, silicon on insulator (SOI) was fabricated by separation by implanted oxygen (SIMOX) layer transfer process. The thickness uniformity of the top Si (superficial Si of the SOI) evaluated by spectroscopic e...
- Plasma doping two-dimensional characterization using low energy x-ray emission spectroscopy and full wafer secondary ion mass spectrometry/angle-resolved x-ray electron spectroscopy techniques
[作者:Qin, S; Morinville, W; Zhuang, K; Fabreguette, F; McTeer, A; Hu, YJ; Lu, SF,期刊:Journal Of Vacuum Science & Technology B, 页码:C1D1-C1D4 , 文章类型: Article,,卷期:2010年28-1]
- Several metrologies may be used to analyze plasma doping (PLAD) [S. Qin and A. McTeer, IEEE Trans. Electron Devices 54, 2497 (2007)] results, each with its own advantages and disadvantages. An investigation into the avai...
- Step-width adjustment in fabrication of staircase structures
[作者:Li, P; Lee, SY; Jeon, SC; Kim, JS; Kim, KN; Hyun, MS; Yoo, JJ; Kim, JW,期刊:Journal Of Vacuum Science & Technology B, 页码:30-35 , 文章类型: Proceedings Paper,,卷期:2010年28-1]
- Three-dimensional structures increasingly find applications in various devices such as diffractive optical elements, photonic element, microelectromechanical systems, etc., and are often fabricated by e-beam lithography....
- Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings
[作者:Whitehead, K; Kelly, P; Li, HQ; Verran, J,期刊:Journal Of Vacuum Science & Technology B, 页码:180-187 , 文章类型: Article,,卷期:2010年28-1]
- Titanium nitride (TiN) is a hard, wear-resistant coating material, which is widely applied to components operating in an abrasive wear environment. When codeposited with silver, the coating forms a nanocomposite structur...
- Improvement in bias stability of amorphous-InGaZnO4 thin film transistors with SiOx passivation layers
[作者:Lim, W; Douglas, EA; Norton, DP; Pearton, SJ; Ren, F; Heo, YW; Son, SY; Yuh, JH,期刊:Journal Of Vacuum Science & Technology B, 页码:116-119 , 文章类型: Article,,卷期:2010年28-1]
- The authors investigated the effect of SiOx passivation layers on the bias stability of bottom gate amorphous (alpha-) InGaZnO4 thin film transistors (TFTs) fabricated on glass substrates. The use of rapid thermal anneal...
- Fully automated hot embossing processes utilizing high resolution working stamps
[作者:Glinsner, T; Veres, T; Kreindl, G; Roy, E; Morton, K; Wieser, T; Thanner, C; Treiblmayr, D; Miller, R; Lindner, P,期刊:Journal Of Vacuum Science & Technology B, 页码:36-41 , 文章类型: Proceedings Paper,,卷期:2010年28-1]
- Nanoimprint lithography is a fast replication technology for structures with sizes ranging from micrometer down to few nanometer range. This article describes the technology for imprinting of polymer substrates as well a...
- Passivation of AlN/GaN high electron mobility transistor using ozone treatment
[作者:Lo, CF; Chang, CY; Pearton, SJ; Kravchenko, II; Dabiran, AM; Wowchak, AM; Cui, B; Chow, PP; Ren, F,期刊:Journal Of Vacuum Science & Technology B, 页码:52-55 , 文章类型: Article,,卷期:2010年28-1]
- Ozone treatment of AlN on AlN/GaN heterostructures produces effective surface passivation and chemical resistance to the AZ positive photoresist developer used for subsequent device fabrication. The ozone-passivated AlN/...
- Metastable structure and magnetism of Cr-doped AlN in AlN/TiN multilayers
[作者:Zeng, F; Fan, B; Yang, YC; Yang, PY; Luo, JT; Chen, C; Pan, F; Yan, WS,期刊:Journal Of Vacuum Science & Technology B, 页码:62-65 , 文章类型: Article,,卷期:2010年28-1]
- [Cr:AlN/TiN] multilayers are prepared with various wavelengths and thicknesses of the single layers. Microstructure studies indicate that the structure of Cr:AlN is a rocksalt structure for the sample of [Cr:AlN(1.8 nm)/...
- 640x480 pixel active-matrix Spindt-type field emitter array image sensor with high-gain avalanche rushing amorphous photoconductor target
[作者:Nanba, M; Takiguchi, Y; Honda, Y; Hirano, Y; Watabe, T; Egami, N; Miya, K; Nakamura, K; Taniguchi, M; Itoh, S; Kobayashi, A,期刊:Journal Of Vacuum Science & Technology B, 页码:96-103 , 文章类型: Article,,卷期:2010年28-1]
- A 640x480 pixel field emitter array (FEA) image sensor with a high-gain avalanche rushing amorphous photoconductor (HARP) target was fabricated and tested as a step toward the development of ultrahigh-sensitivity compact...
- Effect of process related and haze defects on 193 nm immersion lithography
[作者:Tay, CJ; Quan, C; Ling, ML; Lin, Q; Chua, GS,期刊:Journal Of Vacuum Science & Technology B, 页码:45-51 , 文章类型: Article,,卷期:2010年28-1]
- In this article, the effect of a defective mask on 193 nm immersion lithography with a 6% attenuated phase-shifting mask is investigated. Two types of defect are studied: process related defect and haze defect. Several f...
- Roller-reversal imprint process for preparation of large-area microstructures
[作者:Liu, HZ; Jiang, WT; Ding, YC; Shi, YS; Yin, L,期刊:Journal Of Vacuum Science & Technology B, 页码:104-109 , 文章类型: Article,,卷期:2010年28-1]
- The preparation of microstructures with certain patterns on a large-area substrate, especially on a flexible substrate, is a critical step in the development or production of flexible electronics (or macroelectronics). I...
|