- Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
[作者:Forke, R; Scheibner, D; Hiller, K; Gessner, T; Dotzel, W; Mehner, J,期刊:Sensors And Actuators A-Physical, 页码:245-256 , 文章类型: Article,,卷期:2008年145-1]
- Micromechanical resonators for vibration sensing are typically limited to frequencies above 1 kHz [D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. Dotzel, A spectral vibration detection system based on tunable microme...
- Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones
[作者:Bedyk, W; Niessner, M; Schrag, G; Wachutka, G; Margesin, B; Faes, A,期刊:Sensors And Actuators A-Physical, 页码:263-270 , 文章类型: Article,,卷期:2008年145-1]
- We present a methodology to systematically extract efficient and physically-based reduced-order models based on a mixed-level simulation approach and demonstrate its practicality for the design of a capacitive MEMS micro...
- Microfluxgate sensors for high frequency and low power applications
[作者:Delevoye, E; Audoin, A; Beranger, A; Cuchet, R; Hida, R; Jager, T,期刊:Sensors And Actuators A-Physical, 页码:271-277 , 文章类型: Article,,卷期:2008年145-1]
- Low cost and low power consumption are key factors to the spreading of microsystems into the everyday life tools. Fluxgate magnetometer systems still request such an improvement. This paper presents compact thin film mic...
- High sensitivity ultrasonic sensor for hydrophone applications, using an epitaxial Pb(Zr,Ti)O-3 film grown on SrRuO3/Pt/gamma-Al2O3/Si
[作者:Ito, M; Okada, N; Takabe, M; Otonari, M; Akai, D; Sawada, K; Ishida, M,期刊:Sensors And Actuators A-Physical, 页码:278-282 , 文章类型: Article,,卷期:2008年145-1]
- A piezoelectric ultrasonic sensor has been fabricated using an epitaxial lead zirconate titanate, Pb(Zr-x, Ti1-x)O-3 (PZT) thin film, grown on an epitaxial SrRuO3/Pt/gamma-Al2O3/Si substrate. The 3-mu m thick PZT film wa...
- In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
[作者:Krishnamoorthy, U; Olsson, RH; Bogart, GR; Baker, MS; Carr, DW; Swiler, TP; Clews, PJ,期刊:Sensors And Actuators A-Physical, 页码:283-290 , 文章类型: Article,,卷期:2008年145-1]
- We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some of the most sensitive displacement sensors with displacement ...
- A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications
[作者:Selvarasah, S; Chao, SH; Chen, CL; Sridhar, S; Busnaina, A; Khademhosseini, A; Dokmeci, MR,期刊:Sensors And Actuators A-Physical, 页码:306-315 , 文章类型: Article,,卷期:2008年145-1]
- In this paper, we present a low cost, flexible and reusable parylene-C shadow mask technology for diverse micropatterning applications. The smallest feature size of 4 mu m is demonstrated and the technology is scalable u...
- Cathodic corrosion of polycrystalline silicon MEMS
[作者:Hon, M; DelRio, FW; White, JT; Kendig, M; Carraro, C; Maboudian, R,期刊:Sensors And Actuators A-Physical, 页码:323-329 , 文章类型: Article,,卷期:2008年145-1]
- Microelectromechanical systems (MEMS) commonly operate under high electric fields. When combined with humidity from the environment, corrosion becomes a critical reliability issue. While corrosion at the anode has been p...
- Laser microfabrication of long thin holes on biodegradable polymer in vacuum for preventing clogginess and its application to blood collection
[作者:Aoyagi, S; Izumi, H; Nakahara, S; Ochi, M; Ogawa, H,期刊:Sensors And Actuators A-Physical, 页码:464-472 , 文章类型: Article,,卷期:2008年145-1]
- The present paper investigates the excimer laser microfabrication of long thin holes on biodegradable polymer material (polylactic acid, referred to herein as PLA). The fabrication was carried out on several kinds of pol...
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