- Technology platform for the fabrication of titanium nanostructures - art. no. 06FG06
[作者:Ecoffey, S; Guilmain, M; Morissette, JF; Bourque, F; Pont, J; Sang, BL; Drouin, D,期刊:Journal Of Vacuum Science & Technology B, 页码:FG606-FG606 , 文章类型: Article,,卷期:2011年29-6]
- This paper presents two approaches for the fabrication of top-down titanium nanostructures. The first approach involves electron beam lithography followed by a tailored titanium plasma etching. The two main challenges of...
- Selective placement of DNA origami on substrates patterned by nanoimprint lithography - art. no. 06F205
[作者:Penzo, E; Wang, RS; Palma, M; Wind, SJ,期刊:Journal Of Vacuum Science & Technology B, 页码:F6205-F6205 , 文章类型: Article,,卷期:2011年29-6]
- Self-assembled DNA nanostructures can be used as scaffolds to organize small functional nanocomponents. In order to build working devices-electronic circuits, biochips, optical/photonics devices-controlled placement of D...
- Mask roughness challenges in extreme ultraviolet mask development - art. no. 06F501
[作者:Naulleau, P; McClinton, B; Goldberg, KA; Mochi, I; Rastegar, A,期刊:Journal Of Vacuum Science & Technology B, 页码:F6501-F6501 , 文章类型: Article,,卷期:2011年29-6]
- Despite significant progress in the commercialization of extreme ultraviolet (EUV) lithography, many challenges remain. Although availability of a reliable high power source is arguably the most daunting of these challen...
- New approach for measuring protrusive forces in cells - art. no. 06FA02
[作者:Mathur, A; Roca-Cusachs, P; Rossier, OM; Wind, SJ; Sheetz, MP; Hone, J,期刊:Journal Of Vacuum Science & Technology B, 页码:FA602-FA602 , 文章类型: Article,,卷期:2011年29-6]
- Forces experienced by cells internally and externally can alter cellular signaling and function. The authors have developed an elastomeric device for the measurement of protrusive forces generated by cells, in which cell...
- New diamond nanofabrication process for hard x-ray zone plates - art. no. 06FG03
[作者:Uhlen, F; Lindqvist, S; Nilsson, D; Reinspach, J; Vogt, U; Hertz, HM; Holmberg, A; Barrett, R,期刊:Journal Of Vacuum Science & Technology B, 页码:FG603-FG603 , 文章类型: Article,,卷期:2011年29-6]
- The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electron-beam lithography, together ...
- Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study - art. no. 06F206
[作者:Tiron, R; Chevalier, X; Couderc, C; Pradelles, J; Bustos, J; Pain, L; Navarro, C; Magnet, S; Fleury, G; Hadziioannou, G,期刊:Journal Of Vacuum Science & Technology B, 页码:F6206-F6206 , 文章类型: Article,,卷期:2011年29-6]
- In this paper we report a synoptic methodology to evaluate and optimize the long-range order induced by graphoepitaxy of block copolymer (BCP) self-assembly. The authors focus the study on a BCP that produces hexagonally...
- Mechanical characteristics of imprinted nanostructures fabricated with a poly(dimethylsiloxane) mold - art. no. 06FC10
[作者:Kang, Y; Okada, M; Nakai, Y; Haruyama, Y; Kanda, K; Matsui, S,期刊:Journal Of Vacuum Science & Technology B, 页码:FC610-FC610 , 文章类型: Article,,卷期:2011年29-6]
- Nanoscale imprinted pillars were fabricated with three resin systems and characterized by measuring the spring constant using a scanning probe microscopy cantilever manipulated with a three-axis actuator. The functional ...
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