- A surface micromachined thermopile detector array with an interference-based absorber - art. no. 074009
[作者:Wu, H; Emadi, A; Sarro, PM; de Graaf, G; Wolffenbuttel, RF,期刊:Journal of Micromechanics and Microengineering, 页码:74009-74009 , 文章类型: 期刊论文,,卷期:2011年21-7]
- A thermo-electric (TE) infrared detector array composed of 23 thermopiles, each with 5 thermocouples on a suspended beam of 650 x 36 mu m(2) dimensions, has been fabricated in a CMOS-compatible MEMS process. The array is...
- Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films - art. no. 074008
[作者:Nazeer, H; Nguyen, MD; Woldering, LA; Abelmann, L; Rijnders, G; Elwenspoek, MC,期刊:Journal of Micromechanics and Microengineering, 页码:74008-74008 , 文章类型: 期刊论文,,卷期:2011年21-7]
- We determined the Young's modulus of pulsed laser deposited epitaxially grown PbZr0.52Ti0.48O3 (PZT) thin films on microcantilevers by measuring the difference in cantilever resonance frequency before and after depositio...
- On the processing aspects of high performance hybrid backside illuminated CMOS imagers - art. no. 074006
[作者:De Vos, J; De Munck, K; Minoglou, K; Rao, PR; Erismis, MA; De Moor, P; Tezcan, DS,期刊:Journal of Micromechanics and Microengineering, 页码:74006-74006 , 文章类型: 期刊论文,,卷期:2011年21-7]
- In this paper we present a successful integration scheme of a backside (BS) illuminated 1024 x 1024 pixel, 30 mu m thin, sensor array that is flip chipped on a read-out IC die with 10 mu m diameter indium micro bumps, wh...
- Three-dimensional etching of silicon substrates using a modified deep reactive ion etching technique - art. no. 074005
[作者:Azimi, S; Sandoughsaz, A; Amirsolaimani, B; Naghsh-Nilchi, J; Mohajerzadeh, S,期刊:Journal of Micromechanics and Microengineering, 页码:74005-74005 , 文章类型: 期刊论文,,卷期:2011年21-7]
- We report realization of highly featured three-dimensional micro-and nano-structures on silicon substrates with a single masking layer using a hydrogen-assisted deep reactive ion etching process. Three gases of oxygen, h...
- Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter - art. no. 074004
[作者:Abdulla, SMC; Kauppinen, LJ; Dijkstra, M; de Boer, MJ; Berenschot, E; de Ridder, RM; Krijnen, GJM,期刊:Journal of Micromechanics and Microengineering, 页码:74004-74004 , 文章类型: 期刊论文,,卷期:2011年21-7]
- A technology to monolithically integrate micro-bimorph cantilevers equipped with tips that are self-aligned with respect to the holes of a 2D photonic crystal cavity-based channel-drop filter is presented. On electrostat...
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