- Wideband mechanical response of a high-Q silicon double-paddle oscillator - art. no. 065019
[作者:Borrielli, A; Bonaldi, M; Serra, E; Bagolini, A; Conti, L,期刊:Journal of Micromechanics and Microengineering, 页码:65019-65019 , 文章类型: Article,,卷期:2011年21-6]
- We present experimental results of operation of a silicon double-paddle oscillator, namely the mechanical transfer function of the system and the quality factor of its resonant modes. We also describe the fabrication pro...
- Microfabrication of diamond-based slow-wave circuits for mm-wave and THz vacuum electronic sources - art. no. 065022
[作者:Lueck, MR; Malta, DM; Gilchrist, KH; Kory, CL; Mearini, GT; Dayton, JA,期刊:Journal of Micromechanics and Microengineering, 页码:65022-65022 , 文章类型: Article,,卷期:2011年21-6]
- Planar and helical slow-wave circuits for THz radiation sources have been made using novel microfabrication and assembly methods. A biplanar slow-wave circuit for a 650 GHz backward wave oscillator (BWO) was fabricated t...
- Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton - art. no. 065017
[作者:Gosalvez, MA; Ferrando, N; Xing, Y; Pal, P; Sato, K; Cerda, J; Gadea, R,期刊:Journal of Micromechanics and Microengineering, 页码:65017-65017 , 文章类型: Article,,卷期:2011年21-6]
- An evolutionary algorithm is presented for the automated calibration of the continuous cellular automaton for the simulation of isotropic and anisotropic wet chemical etching of silicon in as many as 31 widely different ...
- Alternating SiCl4/O-2 passivation steps with SF6 etch steps for silicon deep etching - art. no. 065015
[作者:Duluard, CY; Ranson, P; Pichon, LE; Pereira, J; Oubensaid, EH; Lefaucheux, P; Puech, M; Dussart, R,期刊:Journal of Micromechanics and Microengineering, 页码:65015-65015 , 文章类型: Article,,卷期:2011年21-6]
- Deep etching of silicon has been investigated in an inductively coupled plasma etch reactor using short SiCl4/O-2 plasma steps to passivate the sidewalls of the etched structures. A study was first carried out to define ...
- A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers - art. no. 065003
[作者:Poelma, RH; Sadeghian, H; Noijen, SPM; Zaal, JJM; Zhang, GQ,期刊:Journal of Micromechanics and Microengineering, 页码:65003-65003 , 文章类型: Article,,卷期:2011年21-6]
- In this paper, a numerical experimental approach for measurement of the effective Young's modulus and its size effect in homogeneous thin films and cantilevers is demonstrated. Cu thin films were used as a case study. Th...
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