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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共171条记录   Nanofabrication of surface-enhanced Raman scattering device by an integrated block-copolymer and nanoimprint lithography method [作者：Yang, EL; Liu, CC; Yang, CYP; Steinhaus, CA; Nealey, PF; Skinner, JL,期刊：Journal Of Vacuum Science & Technology B, 页码：C6M93-C6M97 , 文章类型： Article，,卷期：2010年28-6] The integration of block-copolymers (BCPs) and nanoimprint lithography (NIL) presents a novel and cost-effective approach to achieving nanoscale patterning capabilities. The authors demonstrate the fabrication of a surfa... Nanoimprinting for diffractive light trapping in solar cells [作者：Weiss, DN; Yuan, HC; Lee, BG; Branz, HM; Meyers, ST; Grenville, A; Keszler, DA,期刊：Journal Of Vacuum Science & Technology B, 页码：C6M98-C6M103 , 文章类型： Article，,卷期：2010年28-6] The authors investigate the light-trapping efficiency of nanoimprinted ceramic grating reflectors for crystal silicon photovoltaic cells. Using 25 mu m silicon wafers as a model system and hemispherical reflection measur... Microelectromechanical systems for biomimetical applications [作者：Latif, R; Mastropaolo, E; Bunting, A; Cheung, R; Koickal, T; Hamilton, A; Newton, M; Smith, L,期刊：Journal Of Vacuum Science & Technology B, 页码：C6N1-C6N6 , 文章类型： Article，,卷期：2010年28-6] An etch release process capable of releasing long resonant gate transistor bridges from a sacrificial layer has been studied as a step towards developing a system to mimic the cochlear mechanism inside the human ear. The... Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation [作者：Woszczyna, M; Zawierucha, P; Paletko, P; Zielony, M; Gotszalk, T; Sarov, Y; Ivanov, T; Frank, A; Zollner, JP; Rangelow, IW,期刊：Journal Of Vacuum Science & Technology B, 页码：C6N12-C6N17 , 文章类型： Article，,卷期：2010年28-6] The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the micropr... Piezoelectrically driven silicon carbide resonators [作者：Mastropaolo, E; Gual, I; Wood, G; Bunting, A; Cheung, R,期刊：Journal Of Vacuum Science & Technology B, 页码：C6N18-C6N23 , 文章类型： Article，,卷期：2010年28-6] Silicon carbide cantilever beam resonators have been designed with top electrodes made of piezoelectric lead zirconium titanate (PZT). The devices have been simulated, fabricated, and tested. Piezoelectric actuation has ... Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy [作者：Wielgoszewski, G; Sulecki, P; Gotszalk, T; Janus, P; Szmigiel, D; Grabiec, P; Zschech, E,期刊：Journal Of Vacuum Science & Technology B, 页码：C6N7-C6N11 , 文章类型： Article，,卷期：2010年28-6] In this article, a novel microfabricated thermoresistive scanning thermal microscopy probe is presented. It is a V-shaped silicon nitride cantilever with platinum lines and a sharp off-plane nanotip. The cantilever fabri... On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems [作者：Hosseini, A; Kwong, D; Zhang, Y; Chandorkar, SA; Crnogorac, F; Carlson, A; Fallah, B; Bank, S; Tutuc, E; Rogers, J; Pease, RFW; Chen, RT,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O1-C6O7 , 文章类型： Article，,卷期：2010年28-6] In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dim... Antimonide-based depletion-mode metal-oxide-semiconductor field-effect transistors using small-bandgap InAs channel layers [作者：Lin, HK; Liau, GY; Liu, HK,期刊：Journal Of Vacuum Science & Technology B, 页码：1235-1238 , 文章类型： Article，,卷期：2010年28-6] Antimonide-based depletion-mode InAs channel metal-oxide-semiconductor field-effect transistors showing complete pinch-off characteristics are successfully demonstrated. The epitaxial antimonide materials are grown by mo... Impact of exposure doses on demolding process in UV nanoimprint lithography [作者：Tanabe, T; Fujii, N; Matsue, M; Kawata, H; Hirai, Y,期刊：Journal Of Vacuum Science & Technology B, 页码：1239-1241 , 文章类型： Article，,卷期：2010年28-6] The impact of exposure doses on the demolding process in UV nanoimprint lithography (UV NIL) was studied. The PAK-01 resist was examined to investigate the dependence of the conversion ratio and elastic modulus on the ad... Statistical-noise effect on autocorrelation function of line-edge and line-width roughness [作者：Hiraiwa, A; Nishida, A,期刊：Journal Of Vacuum Science & Technology B, 页码：1242-1250 , 文章类型： Article，,卷期：2010年28-6] Accurate characterization of line-edge roughness (LER) and line-width roughness (LWR) is essential to cope with the growing challenge of device variability in large-scale integrations. The accuracy is affected markedly b... Colloidal optical waveguides with integrated local light sources built by capillary force assembly [作者：Lecarme, O; Rivera, TP; Arbez, L; Honegger, T; Berton, K; Peyrade, D,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O11-C6O15 , 文章类型： Article，,卷期：2010年28-6] Colloidal waveguide fabrication based on the convective assisted capillary force assembly technique and their optical properties is presented in this work. A large variety in shape of colloidal waveguides is built with t... Resonant coupling to a dipole absorber inside a metamaterial: Anticrossing of the negative index response [作者：Smolev, S; Ku, ZY; Brueck, SRJ; Brener, I; Sinclair, MB; Ten Eyck, GA; Langston, WL; Basilio, LI,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O16-C6O20 , 文章类型： Article，,卷期：2010年28-6] The authors experimentally demonstrate a resonant hybridization between the magnetic dipole structural resonance in the permeability of a fishnet metamaterial and an electric dipole material resonance in the permittivity... Fabrication and characterization of coupled metal-dielectric-metal nanoantennas [作者：Joshi, B; Wen, XJ; Sun, K; Lu, W; Wei, QH,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O21-C6O25 , 文章类型： Article，,卷期：2010年28-6] The authors fabricated two dimensional arrays of metal-dielectric-metal nanoantennas consisting of a thin layer of light-emitting polymers sandwiched between two Ag parallel cuboids and characterized them by measuring th... Fabrication of nanostar arrays by nanoimprint lithography [作者：Veres, T; Cui, B; Clime, L,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O26-C6O29 , 文章类型： Article，,卷期：2010年28-6] Using a low-cost and high-throughput process, this work demonstrates the fabrication of nanostar arrays over a large surface area, which would be an efficient substrate for surface enhanced Raman scattering applications.... Fabrication techniques for three-dimensional metamaterials in the midinfrared [作者：Wendt, JR; Burckel, DB; Ten Eyck, GA; Ellis, AR; Brener, I; Sinclair, MB,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O30-C6O33 , 文章类型： Article，,卷期：2010年28-6] The authors have developed two versions of a flexible fabrication technique known as membrane projection lithography that can produce nearly arbitrary patterns in "21/2 D" and fully three-dimensional (3D) structures. The... Self-aligned gold nanocone probe tips [作者：Zeeb, B; Jager, S; Schafer, C; Nill, P; Meixner, AJ; Kern, DP; Fleischer, M,期刊：Journal Of Vacuum Science & Technology B, 页码：C6O34-C6O37 , 文章类型： Article，,卷期：2010年28-6] Spatial resolution and optical near-field enhancement of scanning probes for apertureless near-field scanning optical microscopy depend strongly on the properties and geometry of the scanning probe. A new approach for ve...