Micro electrical discharge milling (ED-milling) is an effective machining process for manufacturing micro structures on hard metals. This method of machining generally uses kerosene or deionized water as the working flui...
This paper describes a comprehensive nonlinear multiphysics model based on the Euler-Bernoulli equation that remains valid up to large displacements in the case of electrostatically actuated nanocantilevers. This purely ...