- Optimized fabrication of curved surfaces by a FIB for direct focusing with glass fibres - art. no. 107003
[作者:Callegari, V; Iwaniuk, D; Bronnimann, R; Schmid, E; Sennhauser, U,期刊:Journal of Micromechanics and Microengineering, 页码:7003-7003 , 文章类型: Article,,卷期:2009年19-10]
- A focused ion beam (FIB) was used to fabricate Fresnel phase lenses on optical fibre tips. The influence of dwell time and the scanning strategy to produce parabolic structures in silicon was investigated, because these ...
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