- Silicon-on-insulation-based deformable mirror array for adaptive optics
[作者:Wang, DJ; Yao, J; Qiu, CK; Hu, FR; Fan, TQ,期刊:Journal Of Vacuum Science & Technology B, 页码:1291-1294 , 文章类型: Conference,,卷期:2009年27-3]
- In this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of t...
- Development of microfluidic device and system for breast cancer cell fluorescence detection
[作者:He, JH; Reboud, J; Ji, HM; Lee, C; Long, Y,期刊:Journal Of Vacuum Science & Technology B, 页码:1295-1298 , 文章类型: Conference,,卷期:2009年27-3]
- A biomicrofluidic device and a compact cellular testing system were developed to be used in cancer diagnostics. The device was fabricated by lithography-based microfabrication techniques, followed by two-step etching of ...
- Low-cost x-ray mask based on micropattern sputtered lead film for x-ray lithography
[作者:Mongpraneet, S; Wisitsora-At, A; Phatthanakun, R; Chomnawang, N; Tuantranont, A,期刊:Journal Of Vacuum Science & Technology B, 页码:1299-1303 , 文章类型: Conference,,卷期:2009年27-3]
- In this work, a low-cost x-ray micromask is developed by sputtering a lead (Pb) film on a Mylar sheet substrate through microshadow masks and the x-ray mask is experimented for patterning an SU-8 negative photoresist on ...
- Deep reactive ion etching as a tool for nanostructure fabrication
[作者:Fu, YQ; Colli, A; Fasoli, A; Luo, JK; Flewitt, AJ; Ferrari, AC; Milne, WI,期刊:Journal Of Vacuum Science & Technology B, 页码:1520-1526 , 文章类型: Conference,,卷期:2009年27-3]
- Deep reactive ion etching (DRIE) is investigated as a tool for the realization of nanostructures and architectures, including nanopillars, silicon nanowires or carbon nanotubes on Si nanopillars, nanowalls, and nanonetwo...
- Electronic coupling in MgxZn1-xO/ZnO double quantum wells
[作者:Zippel, J; Lenzner, J; Benndorf, G; Lange, M; Hochmuth, H; Lorenz, M; Grundmann, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1735-1740 , 文章类型: Conference,,卷期:2009年27-3]
- The electronic coupling in ZnO/MgZnO double-quantum-well (DQW) structures grown with pulsed-laser deposition is investigated. The two ZnO quantum wells, separated by a thin MgxZn1-xO barrier (x approximate to 0.14-0.16),...
- Temperature dependence of localization effects of excitons in ZnO/CdxZn1-xO/ZnO double heterostructures
[作者:Lange, M; Zippel, J; Benndorf, G; Czekalla, C; Hochmuth, H; Lorenz, M; Grundmann, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1741-1745 , 文章类型: Conference,,卷期:2009年27-3]
- ZnO/CdxZn1-xO double heterostructures grown on a-plane sapphire substrates by pulsed-laser deposition were investigated concerning their photoluminescence properties. The localization of excitons in the CdxZn1-xO alloys ...
- Protein patterning by thermal nanoimprint lithography and NH3-plasma functionalization of polystyrene
[作者:Trabadelo, V; Retolaza, A; Merino, S; Cruz, A; Heredia, P; Foelske, A; Schift, H; Padeste, C,期刊:Journal Of Vacuum Science & Technology B, 页码:1060-1062 , 文章类型: Article,,卷期:2009年27-3]
- New approach to create a pattern of specific protein binding sites via nanoimprint lithography is presented. NH3-plasma functionalized, patterned polystyrene covalently binds a biotin linker to which streptavidin is boun...
- Enhanced surface blistering of germanium with B+/H+ coimplantation
[作者:Ma, XB; Du, XF; Liu, WL; Chen, C; Song, ZT; Lin, CL,期刊:Journal Of Vacuum Science & Technology B, 页码:1063-1067 , 文章类型: Article,,卷期:2009年27-3]
- The surface blisters in B+/H+ coimplanted germanium (Ge) and H-only-implanted Ge were compared. The surface-blister phenomenon in B+/H+ coimplanted Ge emerged after annealing at 330-340 degrees C; but in H-only-implanted...
- Controlled morphology of microtools shaped using focused ion beam milling technique
[作者:Zhang, SJ; Fang, FZ; Xu, ZW; Hu, XT,期刊:Journal Of Vacuum Science & Technology B, 页码:1304-1309 , 文章类型: Conference,,卷期:2009年27-3]
- Advantages of focused ion beam (FIB) technology in micromachining are high feature resolution, capable of maskless processing, rapid prototyping, and adaptive for various materials and geometries. FIB was extensively use...
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