- Microstructure dependent switching properties of VO2 thin films
[作者:Lappalainen, J; Heinilehto, S; Saukko, S; Lantto, W; Jantunen, H,期刊:Sensors And Actuators A-Physical, 页码:250-255 , 文章类型: Article,,卷期:2008年142-1]
- Vanadium dioxide (VO2) thin films with different microstructure and orientations were deposited on sapphire and MgO substrates using pulsed laser deposition technique (PLD). X-ray diffraction (XRD), scanning probe micros...
- Performance characterization of a miniature spiral-channel viscous pump
[作者:Al-Halhouli, AT; Demming, S; Feldmann, M; Buettgenbach, S; Kilani, MI; Al-Salaymeh, A,期刊:Sensors And Actuators A-Physical, 页码:256-262 , 文章类型: Article,,卷期:2008年142-1]
- This work describes the development and testing of a miniature spiral-channel viscous pump. The pump consists of a 12 mm diameter spiral disk on which a spiral-channel is machined with heights of I or 2 mm, a width of I ...
- Power MEMS - A capacitive vibration-to-electrical energy converter with built-in voltage
[作者:Kuehne, I; Frey, A; Marinkovic, D; Eckstein, G; Seidel, H,期刊:Sensors And Actuators A-Physical, 页码:263-269 , 文章类型: Article,,卷期:2008年142-1]
- This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space e...
- Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
[作者:Forke, R; Scheibner, D; Mehner, JE; Gessner, T; Dotzel, W,期刊:Sensors And Actuators A-Physical, 页码:276-283 , 文章类型: Article,,卷期:2008年142-1]
- Within this paper we present a new microsystem for frequency selective vibration monitoring in the frequency range below 1 kHz. The novel sensor is based on two force coupled oscillators, operating at standard pressure, ...
- Modelling the dynamics of a MEMS resonator: Simulations and experiments
[作者:Mestrom, RMC; Fey, RHB; van Beek, JTM; Phan, KL; Nijmeijer, H,期刊:Sensors And Actuators A-Physical, 页码:306-315 , 文章类型: Article,,卷期:2008年142-1]
- Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the resonator response. Based on experimental results, a modelling...
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