- Luminescence uniformity studies on dendrite bamboo carbon submicron-tube field-emitter arrays
[作者:Li, X; Ding, FQ; Liu, WH; He, YN; Zhu, CC,期刊:Journal Of Vacuum Science & Technology B, 页码:171-174 , 文章类型: Article,,卷期:2008年26-1]
- This is a study on the field emission (FE) from carbon submicron-tube multiwall covered with carbon nanotubes (MWCNTs), which forms a dendrite structure as a field-emitter array, by chemical vapor deposition method. To i...
- Structural and electrical studies of conductive nanowires prepared by focused ion beam induced deposition
[作者:Reguer, A; Bedu, F; Tonneau, D; Dallaporta, H; Prestigiacomo, M; Houel, A; Sudraud, P,期刊:Journal Of Vacuum Science & Technology B, 页码:175-180 , 文章类型: Article,,卷期:2008年26-1]
- Conductive nanowires were deposited by a focused gallium ion beam using W(CO)(6) and (CH3)(3)CH3C5H4Pt as precursors. An in situ electrical treatment can substantially modify the structure and resistivity of these nanowi...
- Improvement of the wiggling profile of spin-on carbon hard mask by H-2 plasma treatment
[作者:Tadokoro, M; Yonekura, K; Yoshikawa, K; Ono, Y; Ishibashi, T; Hanawa, T; Fujiwara, N; Matsunobe, T; Matsuda, K,期刊:Journal Of Vacuum Science & Technology B, 页码:67-71 , 文章类型: Article,,卷期:2008年26-1]
- The H-2 plasma treatment for spin-on carbon (SOC) hard mask in the trilayer resist process is expected to serve as a reliable alternative to single layer resist process for 45 nm nodes and beyond. The authors have invest...
- Fabrication of silicon kinoform lenses for hard x-ray focusing by electron beam lithography and deep reactive ion etching
[作者:Stein, A; Evans-Lutterodt, K; Bozovic, N; Taylor, A,期刊:Journal Of Vacuum Science & Technology B, 页码:122-127 , 文章类型: Article,,卷期:2008年26-1]
- The focusing of subnanometer wavelength x rays is limited by the ability to fabricate high-quality optics. In general, the resolution is of the order of the smallest feature of the optic, so nanometer spot sizes are extr...
- Plasma reactor dry cleaning strategy after TiN, TaN and HfO2 etching processes
[作者:Ramos, R; Cunge, G; Joubert, O,期刊:Journal Of Vacuum Science & Technology B, 页码:181-188 , 文章类型: Article,,卷期:2008年26-1]
- The authors have investigated the etch chamber recovery after TiN, TaN, and HfO2 metal gate etching processes. The deposits formed on the reactor walls after etching these materials in various chemistries have been analy...
- Hybrid nanofabrication processes utilizing diblock copolymer nanotemplate prepared by self-assembled monolayer based surface neutralization
[作者:Kim, SJ; Maeng, WJ; Lee, SK; Park, DH; Bang, SH; Kim, H; Sohn, BH,期刊:Journal Of Vacuum Science & Technology B, 页码:189-194 , 文章类型: Article,,卷期:2008年26-1]
- Nanostructures including nanohole and metal dot arrays were fabricated by hybrid processes combing self-assembled diblock copolymer and conventional semiconductor processes. The interfacial energy between polystyrene-b-p...
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