- Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout
[作者:Cocuzza, M; Ferrante, I; Ricci, A; Giuri, E; Scaltrito, L; Bich, D; Merialdo, A; Schina, P; Correale, R,期刊:Journal Of Vacuum Science & Technology B, 页码:541-550 , 文章类型: Article,,卷期:2008年26-2]
- This work is focused on the design, fabrication, and characterization of silicon laterally resonant microcantilevers for measuring absolute pressure. The authors have demonstrated the integration of resonance electrostat...
- Energy exchange in field emission from semiconductors
[作者:Chung, MS; Jang, YJ; Mayer, A; Cutler, PH; Miskovsky, NM; Weis, BL,期刊:Journal Of Vacuum Science & Technology B, 页码:800-805 , 文章类型: Article,,卷期:2008年26-2]
- Field emission from semiconductors has been theoretically investigated by describing the energy transfer of electron. The authors developed a theory for the replacement process to calculate the energy exchange Delta epsi...
- Electrical properties of conductive and resistive ZnSe layers
[作者:Oh, DC; Im, IH; Park, SH; Hanada, T; Yao, T; Song, JS; Chang, JH; Makino, H; Han, CS; Koo, KH,期刊:Journal Of Vacuum Science & Technology B, 页码:559-565 , 文章类型: Article,,卷期:2008年26-2]
- The authors have investigated the electrical properties for one typical set of Al-doped ZnSe layers: one is conductive (type I) and the other is resistive (type II). The two types of ZnSe: Al layers are grown on differen...
- Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process
[作者:Rhee, H; Kwon, H; Kim, CK; Kim, H; Yoo, J; Kim, YW,期刊:Journal Of Vacuum Science & Technology B, 页码:576-581 , 文章类型: Article,,卷期:2008年26-2]
- Silicon was etched with the Bosch process using C4F8 and C4F6 plasmas in the deposition step to show a feasibility of the use of UFC plasmas in the Bosch process. The use of C4F8 and C4F6 plasmas resulted in different ch...
- Indium-doped ZnO nanospirals synthesized by thermal evaporation
[作者:Gao, H; Ji, H; Zhang, X; Lu, H; Liang, Y,期刊:Journal Of Vacuum Science & Technology B, 页码:585-588 , 文章类型: Article,,卷期:2008年26-2]
- Indium-doped ZnO nanospirals were synthesized by one-step thermal evaporation. Transmission electron micrographs show that the nanospirals are structurally uniform and free of defects. The helical nanostructures, which a...
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