- Evaluation of electron energy spread in CsBr based photocathodes
[作者:Maldonado, JR; Sun, Y; Liu, Z; Liu, XF; Tanimoto, S; Pianetta, P; Pease, F,期刊:Journal Of Vacuum Science & Technology B, 页码:2085-2090 , 文章类型: Article,,卷期:2008年26-6]
- Photocathodes with relatively low energy spread (< 0.5 eV) are required for electron sources in several applications including single and multiple electron beam inspection and lithography tools and free electron lasers. ...
- The effect of thin metal overlayers on the electron beam exposure of polymethyl methacrylate
[作者:Samantaray, CB; Hastings, JT,期刊:Journal Of Vacuum Science & Technology B, 页码:2300-2305 , 文章类型: Article,,卷期:2008年26-6]
- Here, the authors consider the effect of thin metal coatings on the contrast, clearing dose, and resolution of polymethyl methacrylate (PMMA) electron beam resist. They present processes suitable for deposition, exposure...
- Fabrication of elastomer pillar arrays with modulated stiffness for cellular force measurements
[作者:Ghassemi, S; Biais, N; Maniura, K; Wind, SJ; Sheetz, MP; Hone, J,期刊:Journal Of Vacuum Science & Technology B, 页码:2549-2553 , 文章类型: Article,,卷期:2008年26-6]
- The mechanical properties of a cell's environment can alter behavior such as migration and spreading, and control the differentiation path of stem cells. Here the authors describe a technique for fabricating substrates w...
- Nanomodified surfaces and guidance of nerve cell processes
[作者:Johansson, F; Hallstrom, W; Gustavsson, P; Wallman, L; Prinz, C; Montelius, L; Kanje, M,期刊:Journal Of Vacuum Science & Technology B, 页码:2558-2561 , 文章类型: Article,,卷期:2008年26-6]
- Axonal growth and guidance were studied on different micro- and nanostructured surfaces. Nanoimprinted grooves in a polymer, epitaxial III/V nanowires, porous silicon patterns, and chemically altered surfaces were all sh...
- Imprinted large-scale high density polymer nanopillars for organic solar cells
[作者:Aryal, M; Buyukserin, F; Mielczarek, K; Zhao, XM; Gao, JM; Zakhidov, A; Hu, WC,期刊:Journal Of Vacuum Science & Technology B, 页码:2562-2566 , 文章类型: Article,,卷期:2008年26-6]
- Nanoimprint with a large-scale nanoporous Si mold is developed to fabricate high density periodic nanopillars (similar to 10(10)/cm(2)) in various functional polymers. A anodic alumina membrane is first obtained using el...
- Elemental analysis with the helium ion microscope
[作者:Sijbrandij, S; Thompson, B; Notte, J; Ward, BW; Economou, NP,期刊:Journal Of Vacuum Science & Technology B, 页码:2103-2106 , 文章类型: Article,,卷期:2008年26-6]
- The newly developed helium ion microscope is an instrument well suited to high resolution surface specific imaging with several unique contrast mechanisms. In addition to its imaging capabilities, the focused helium ion ...
- Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method
[作者:Chen, CCP; Gurhanli, A; Chiang, TY; Hong, JJ; Melvin, LS,期刊:Journal Of Vacuum Science & Technology B, 页码:2322-2330 , 文章类型: Article,,卷期:2008年26-6]
- Abbe's method and Hopkin's method are among the most popular microlithography aerial image simulation methods. In particular, Hopkin's method is generally more popular for the high speed aerial image simulation domain, a...
- Aberration correction for electron beam inspection, metrology, and lithography
[作者:Munro, E; Rouse, J; Liu, HN; Wang, LP,期刊:Journal Of Vacuum Science & Technology B, 页码:2331-2336 , 文章类型: Article,,卷期:2008年26-6]
- This article investigates, with computer simulations, whether electron optical aberration correctors could be used to improve the performance of electron beam equipment for the semiconductor manufacturing industry. The s...
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