- Semi-crystalline poly(4-methyl-1-pentene) polymers for replication of high aspect ratio diffractive features - art. no. 025020
[作者:Kalima, V; Siitonen, S; Karvinen, P; Suvanto, M; Kuittinen, M; Pakkanen, TT,期刊:Journal of Micromechanics and Microengineering, 页码:25020-25020 , 文章类型: Article,,卷期:2008年18-2]
- Two transparent semi-crystalline poly(4-methyl-1-pentene) copolymers (P4MP1) of different molar mass distributions were used for injection molding of high aspect ratio (height/width) diffractive gratings. High quality su...
- The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor - art. no. 025021
[作者:Ismail, AK; Burdess, JS; Harris, AJ; Suarez, G; Keegan, N; Spoors, JA; Chang, SC; McNeil, CJ; Hedley, J,期刊:Journal of Micromechanics and Microengineering, 页码:25021-25021 , 文章类型: Article,,卷期:2008年18-2]
- This paper presents a discussion on the fabrication, characterization and testing of a degenerate mode resonant mass sensor which takes the form of a crystalline silicon MEMS circular diaphragm. The device is fabricated ...
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