- Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter
[作者:Mukherjee, P; Kang, MG; Zurbuchen, TH; Guo, LJ; Herrero, FA,期刊:Journal Of Vacuum Science & Technology B, 页码:2645-2648 , 文章类型: Article,,卷期:2007年25-6]
- To measure space plasmas and neutral particles one must filter out high-energy ultraviolet photons that would increase background count or damage sensors. To enable sensitive neutral particle measurements, a photon-to-pa...
- V-groove plasmonic waveguides fabricated by nanoimprint lithography
[作者:Fernandez-Cuesta, I; Nielsen, RB; Boltasseva, A; Borrise, X; Perez-Murano, F; Kristensen, A,期刊:Journal Of Vacuum Science & Technology B, 页码:2649-2653 , 文章类型: Article,,卷期:2007年25-6]
- Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method...
- 58 nm half-pitch plastic wire-grid polarizer by nanoimprint lithography
[作者:Chen, L; Wang, JJ; Walters, F; Deng, X; Buonanno, M; Tai, S; Liu, XM,期刊:Journal Of Vacuum Science & Technology B, 页码:2654-2657 , 文章类型: Article,,卷期:2007年25-6]
- Plastic nanowire-grid polarizers based on small period, 58 and 75 nm half-pitch, Al gratings are fabricated and studied. Al gratings are made by coating Al on the polymer grating sidewalls at oblique angles. The nanopoly...
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