- A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators
[作者:Giner, J; Uranga, A; Munoz-Gamarra, JL; Marigo, E; Barniol, N,期刊:Journal of Micromechanics and Microengineering, 页码:55020-55020 , 文章类型: Article,,卷期:2012年22-5]
- In this paper, a novel fully integrated CMOS-MEMS filter implemented on a commercial CMOS technology is presented. The combination of mechanical and electrical coupling is used to enhance the response of the band pass fi...
- Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication
[作者:Keum, H; Carlson, A; Ning, HL; Mihi, A; Eisenhaure, JD; Braun, PV; Rogers, JA; Kim, S,期刊:Journal of Micromechanics and Microengineering, 页码:55018-55018 , 文章类型: Article,,卷期:2012年22-5]
- We present a micromanufacturing method for constructing microsystems, which we term 'micro-masonry' based on individual manipulation, influenced by strategies for deterministic materials assembly using advanced forms of ...
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