- Blue light emission from a glass/liquid interface for real-time monitoring of a laser-induced etching process - art. no. 075019
[作者:Cheng, JY; Mousavi, MZ; Wu, CY; Tsai, HF,期刊:Journal of Micromechanics and Microengineering, 页码:75019-75019 , 文章类型: 期刊论文,,卷期:2011年21-7]
- An organic dye, Oil-Red-O, dissolved in p-xylene was used for laser-induced backside wet etching using a visible laser (visible-LIBWE) for the first time. Blue light (360-500 nm) emission from the glass/liquid interface ...
- High-pressure stainless steel active membrane microvalves - art. no. 075010
[作者:Sharma, G; Svensson, S; Ogden, S; Klintberg, L; Hjort, K,期刊:Journal of Micromechanics and Microengineering, 页码:75010-75010 , 文章类型: 期刊论文,,卷期:2011年21-7]
- In this work, high-pressure membrane microvalves have been designed, manufactured and evaluated. The valves were able to withstand back-pressures of 200 bar with a response time of less than 0.6 s. These stainless steel ...
- Control of charged droplets using electrohydrodynamic repulsion for circular droplet patterning - art. no. 075020
[作者:Kim, B; Nam, H; Kim, SJ; Sung, J; Joo, SW; Lim, G,期刊:Journal of Micromechanics and Microengineering, 页码:75020-75020 , 文章类型: 期刊论文,,卷期:2011年21-7]
- We report a novel method to form a circular pattern of monodisperse microdroplets using an electrohydrodynamic repulsion (EDR) mechanism. EDR is a phenomenon of electrostatical bounced microdroplets from an accumulated d...
- A single-mask thermal displacement sensor in MEMS - art. no. 074007
[作者:Krijnen, B; Hogervorst, RP; van Dijk, JW; Engelen, JBC; Woldering, LA; Brouwer, DM; Abelmann, L; Soemers, HMJR,期刊:Journal of Micromechanics and Microengineering, 页码:74007-74007 , 文章类型: 期刊论文,,卷期:2011年21-7]
- This work presents a MEMS displacement sensor based on the conductive heat transfer of a resistively heated silicon structure towards an actuated stage parallel to the structure. This differential sensor can be easily in...
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