- Impact of metal etch residues on etch species density and uniformity
[作者:Dictus, D; Shamiryan, D; Paraschiv, V; Boullart, W; De Gendt, S; Vinckier, C,期刊:Journal Of Vacuum Science & Technology B, 页码:789-794 , 文章类型: Article,,卷期:2010年28-4]
- Uniformity and wafer-to-wafer reproducibility of plasma etch processes are often related to the conditioning of the plasma etch chamber walls. For advanced complementary metal-oxide semiconductor fabrication, numerous me...
- Scatterometric porosimetry: A new characterization technique for porous material patterned structures
[作者:Bouyssou, R; El Kodadi, M; Licitra, C; Chevolleau, T; Besacier, M; Posseme, N; Joubert, O; Schiavone, P,期刊:Journal Of Vacuum Science & Technology B, 页码:L31-L34 , 文章类型: Article,,卷期:2010年28-4]
- A new technique, so called "scatterometric porosimetry" (SP) has been developed to improve our knowledge on the properties of porous material patterned structures. None of the existing techniques is able to characterize ...
- Electric field induced motion of metallic droplets: Application to submicron contactor
[作者:Dallaporta, H; Prestigiacomo, M; Bedu, F; Tonneau, D; Chatain, D; Sudraud, P,期刊:Journal Of Vacuum Science & Technology B, 页码:L35-L38 , 文章类型: Article,,卷期:2010年28-4]
- This article reports the monitoring of reversible displacement of a gallium droplet on a tungsten submicron wire deposited by focused ion beam from tungsten hexacarbonyl precursor. The authors demonstrate that by applyin...
- Semiconductor-superconductor transition and magnetoresistance terraces in an ultrathin superconducting Pb nanobridge
[作者:Wang, JA; Jia, JF; Ma, XC; Shen, QT; Han, TZ; Jin, AZ; Lu, L; Gu, CZ; Tian, ML; Xie, XC; Xue, QK,期刊:Journal Of Vacuum Science & Technology B, 页码:678-681 , 文章类型: Article,,卷期:2010年28-4]
- Using focused ion beam etching technique, the authors fabricated a 28 atomic monolayers thick, 500 nm wide, and 10 mu m long Pb nanobridge from an atomically flat Pb thin film grown on Si by molecular beam epitaxy. Elect...
- Molecular structure effects on dry etching behavior of Si-containing resists in oxygen plasma
[作者:Bruce, RL; Lin, T; Phaneuf, RJ; Oehrlein, GS; Bell, W; Long, B; Willson, CG,期刊:Journal Of Vacuum Science & Technology B, 页码:751-757 , 文章类型: Article,,卷期:2010年28-4]
- The authors have studied the influence of Si-O bonding in the polymer structure of Si-containing resists on O-2 plasma etch behavior. Three polymers were synthesized with the same Si wt % (12.1%) and varying number of Si...
- Extension of active region in crossbar-type polymer solar photovoltaics induced by highly conductive PEDOT:PSS buffer layer
[作者:Huang, TS; Huang, CY; Su, YK; Chen, YC; Fang, JS; Wen, TC,期刊:Journal Of Vacuum Science & Technology B, 页码:702-705 , 文章类型: Article,,卷期:2010年28-4]
- The authors have demonstrated and estimated the extension of active region in P3HT:PCBM solar photovoltaics due to the increase in the conductivity of PEDOT:PSS. For the polymer photovoltaics with a crossbar-type electro...
- Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generator
[作者:Miyazoe, H; Utke, I; Kikuchi, H; Kiriu, S; Friedli, V; Michler, J; Terashima, K,期刊:Journal Of Vacuum Science & Technology B, 页码:744-750 , 文章类型: Article,,卷期:2010年28-4]
- Local coinjection of a (H-2-Ar) microplasma jet and Cu(O2C5F6H)(2) molecules during focused electron beam-induced deposition (FEBID) was studied with respect to changes in the Cu: C ratio of deposits. Microplasma-assiste...
- Effect of rapid thermal annealing on MgxZn1-xO films prepared by radio-frequency magnetron sputtering
[作者:Hsueh, KP; Tun, CJ; Chiu, HC; Huang, YP; Chi, GC,期刊:Journal Of Vacuum Science & Technology B, 页码:720-723 , 文章类型: Article,,卷期:2010年28-4]
- This study investigates the effects of thermal annealing on the MgxZn1-xO films. MgxZn1-xO films were deposited by a radio-frequency magnetron sputtering system using a 6 in. ZnO/MgO (80/20wt%) target. The Hall results, ...
- Carbon nanotube field emitter irradiated by proton beam
[作者:Lee, SM; Kim, WJ; Kim, YH; Yang, T; Han, J,期刊:Journal Of Vacuum Science & Technology B, 页码:724-728 , 文章类型: Proceedings Paper,,卷期:2010年28-4]
- The present study adopts proton irradiation to solve the problems, such as performance degradation due to outgassing and weak adhesion, of a carbon nanotube (CNT) field emitter fabricated by the indirect coating method. ...
- Field emission behavior study of multiwalled carbon nanotube yarn under the influence of adsorbents
[作者:Liu, P; Jiang, KL; Wei, Y; Liu, K; Liu, LA; Fan, SS,期刊:Journal Of Vacuum Science & Technology B, 页码:736-739 , 文章类型: Article,,卷期:2010年28-4]
- The authors have studied the field emission (FE) behavior of multiwalled carbon nanotube (MWCNT) yarn at different temperatures. By analyzing how the FE characteristics change with temperature and the residual gas spectr...
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