- Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation
[作者:Ishida, T; Nakajima, Y; Kakushima, K; Mita, M; Toshiyoshi, H; Fujita, H,期刊:Journal of Micromechanics and Microengineering, 页码:75011-75011 , 文章类型: Article,,卷期:2010年20-7]
- Basic studies of nanometer scale phenomena, such as tribology, fusion bonding and deformation, are important for a MEMS/NEMS device. To better understand these nanometer scale phenomena, the combination of MEMS and trans...
- Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media
[作者:Alava, T; Mathieu, F; Mazenq, L; Soyer, C; Remiens, D; Nicu, L,期刊:Journal of Micromechanics and Microengineering, 页码:75014-75014 , 文章类型: Article,,卷期:2010年20-7]
- In this paper, the authors report for the first time the physical cointegration of piezoelectric actuation and piezoresistive detection on resonating micromembranes dedicated to microgravimetric biosensing applications. ...
- Methods of reducing non-specific adsorption in microfluidic biosensors
[作者:Choi, S; Chae, J,期刊:Journal of Micromechanics and Microengineering, 页码:75015-75015 , 文章类型: Article,,卷期:2010年20-7]
- Non-specific adsorption (NSA) of biomolecules is a persistent challenge in microfluidic biosensors. Microfluidic biosensors often have immobilized bioreceptors such as antibodies, enzymes, DNAs, etc, via linker molecules...
- Lateral capillary forces of cylindrical fluid menisci: a comprehensive quasi-static study
[作者:Mastrangeli, M; Valsamis, JB; Van Hoof, C; Celis, JP; Lambert, P,期刊:Journal of Micromechanics and Microengineering, 页码:75041-75041 , 文章类型: Article,,卷期:2010年20-7]
- Capillarity is pivotal to many important technologies, including capillary self-alignment and self-assembly for heterogeneous microsystem integration and packaging. Lateral capillary forces ensuing from perturbed fluid m...
- Large displacement vertical translational actuator based on piezoelectric thin films
[作者:Qiu, Z; Pulskamp, JS; Lin, XK; Rhee, CH; Wang, T; Polcawich, RG; Oldham, K,期刊:Journal of Micromechanics and Microengineering, 页码:75016-75016 , 文章类型: Article,,卷期:2010年20-7]
- A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage...
- Fabrication of microstructured silicon (mu s-Si) from a bulk Si wafer and its use in the printing of high-performance thin-film transistors on plastic substrates
[作者:Lee, KJ; Ahn, H; Motala, MJ; Nuzzo, RG; Menard, E; Rogers, JA,期刊:Journal of Micromechanics and Microengineering, 页码:75018-75018 , 文章类型: Article,,卷期:2010年20-7]
- In this paper, we report a new fabrication route to generate microstructured, single-crystalline silicon (mu s-Si) ribbons using (1 1 0) silicon. Two different methods were explored for producing these printable structur...
- Magnetic field-assisted electrochemical discharge machining
[作者:Cheng, CP; Wu, KL; Mai, CC; Hsu, YS; Yan, BH,期刊:Journal of Micromechanics and Microengineering, 页码:75019-75019 , 文章类型: Article,,卷期:2010年20-7]
- Electrochemical discharge machining (ECDM) is an effective unconventional method for micromachining in non-conducting materials, such as glass, quartz and some ceramics. However, since the spark discharge performance bec...
- Grazing incidence broad ion beams for reducing line-edge roughness
[作者:Struck, CRM; Flauta, R; Neumann, MJ; Kim, KN; Raju, R; Bristol, RL; Ruzic, DN,期刊:Journal of Micromechanics and Microengineering, 页码:75038-75038 , 文章类型: Article,,卷期:2010年20-7]
- As semiconductor feature sizes continue to decrease, the phenomena of line-edge roughness (LER) becomes more disruptive in chip manufacturing. While many efforts are underway to decrease LER from the photoresist, post-de...
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