- Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors - art. no. 105017
[作者:Tsai, MH; Sun, CM; Liu, YC; Wang, CW; Fang, WL,期刊:Journal of Micromechanics and Microengineering, 页码:5017-5017 , 文章类型: Article,,卷期:2009年19-10]
- This study presents a process design methodology to improve the performance of a CMOS-MEMS gap-closing capacitive sensor. In addition to the standard CMOS process, the metal wet-etching approach is employed as the post-C...
- Development of a flexible microfluidic system integrating magnetic micro-actuators for trapping biological species - art. no. 105019
[作者:Fulcrand, R; Jugieu, D; Escriba, C; Bancaud, A; Bourrier, D; Boukabache, A; Gue, AM,期刊:Journal of Micromechanics and Microengineering, 页码:5019-5019 , 文章类型: Article,,卷期:2009年19-10]
- A flexible microfluidic system embedding microelectromagnets has been designed, modeled and fabricated by using a photosensitive resin as structural material. The fabrication process involves the integration of micro-coi...
- Anti-sticking behavior of DLC-coated silicon micro-molds - art. no. 105025
[作者:Saha, B; Liu, E; Tor, SB; Khun, NW; Hardt, DE; Chun, JH,期刊:Journal of Micromechanics and Microengineering, 页码:5025-5025 , 文章类型: Article,,卷期:2009年19-10]
- Pure carbon-(C), nitrogen-(N) and titanium-(Ti) doped diamond-like carbon (DLC) coatings were deposited on silicon (Si) micro-molds by dc magnetron sputtering deposition to improve the tribological performance of the mic...
- A catheter-type flow sensor for measurement of aspirated- and inspired-air characteristics in the bronchial region - art. no. 105027
[作者:Shikida, M; Naito, J; Yokota, T; Kawabe, T; Hayashi, Y; Sato, K,期刊:Journal of Micromechanics and Microengineering, 页码:5027-5027 , 文章类型: Article,,卷期:2009年19-10]
- We developed a novel catheter-type flow sensor for measuring the aspirated- and inspired-air characteristics trans-bronchially. An on-wall in-tube thermal flow sensor is mounted inside the tube, and it is used as a measu...
- Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment - art. no. 105029
[作者:Lee, JW; Tung, R; Raman, A; Sumali, H; Sullivan, JP,期刊:Journal of Micromechanics and Microengineering, 页码:5029-5029 , 文章类型: Article,,卷期:2009年19-10]
- An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum...
- On-demand electrohydrodynamic jetting with meniscus control by a piezoelectric actuator for ultra-fine patterns - art. no. 107001
[作者:Kim, YJ; Kim, SY; Lee, JS; Hwang, J; Kim, YJ,期刊:Journal of Micromechanics and Microengineering, 页码:7001-7001 , 文章类型: Article,,卷期:2009年19-10]
- The on-demand ejection of ultra-fine droplets that uses both an electrohydrodynamic (EHD) force and mechanical actuation is presented. The liquid meniscus was controlled by a piezoelectric actuator, and the droplets were...
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