- Development of three-axis desktop milling machine
[作者:Wang, QY; Fang, FZ; Hu, XT,期刊:Journal Of Vacuum Science & Technology B, 页码:1278-1284 , 文章类型: Conference,,卷期:2009年27-3]
- With a trend toward miniaturization, miniaturized machine tools turn to be more and more reasonable than conventional machine tools in fabricating scaled-down work parts with better quality, higher efficiency, and less e...
- Study on reaction mechanism of Si and pure CeO2 for chemical-mechanical-grinding process
[作者:Kamiya, S; Iwase, H; Kishita, K; Zhou, LB; Eda, H; Yoshida, Y,期刊:Journal Of Vacuum Science & Technology B, 页码:1496-1502 , 文章类型: Conference,,卷期:2009年27-3]
- The thinning process of silicon wafer for power device in automotive applications requires stress relief and relatively high Si removal rate. The innovative process of chemical mechanical grinding (CMG) has been develope...
- Polarity-related asymetry at ZnO surfaces and metal interfaces
[作者:Dong, YF; Fang, ZQ; Look, DC; Doutt, DR; Hetzer, MJ; Brillson, LJ,期刊:Journal Of Vacuum Science & Technology B, 页码:1710-1716 , 文章类型: Conference,,卷期:2009年27-3]
- Clean ZnO (0001) Zn- and (0001 ) O-polar surfaces and metal interfaces have been systematically studied by depth-resolved cathodoluminescence spectroscopy, photoluminescence, current-voltage and capacitance-voltage measu...
- Bond lengths, phase stability, and band gaps in MgxZn1-xO alloys
[作者:Boonchun, A; Lambrecht, WRL,期刊:Journal Of Vacuum Science & Technology B, 页码:1717-1721 , 文章类型: Conference,,卷期:2009年27-3]
- The main question studied in this article is how the preference of MgO for six- or fivefold bonding in rocksalt or h-MgO structures, respectively, affects the local bond lengths near Mg atoms in wurtzite structured MgxZn...
- Interface stability in advanced high-kappa-metal-gate stacks
[作者:Adelmann, C; Franquet, A; Conard, T; Witters, T; Ferain, I; Meersschaut, J; Jurczak, M; De Meyer, K; Kittl, JA; Van Elshocht, S,期刊:Journal Of Vacuum Science & Technology B, 页码:1021-1025 , 文章类型: Conference,,卷期:2009年27-3]
- Thin film reactions and interface formation in advanced high-kappa-metal-gate stacks containing rare-earth oxides have been studied. In particular, interfacial reactions of Dy2O3 and HfSiO4 with TiN- or TaCN-based metals...
- Electrical levels of defect investigation of ZrO2 thin film by spectroscopic ellipsometry
[作者:Chen, YR; Zhou, P; Li, J; Chen, LY,期刊:Journal Of Vacuum Science & Technology B, 页码:1030-1034 , 文章类型: Article,,卷期:2009年27-3]
- The electrical levels of defects of high-k dielectric ZrO2 films deposited with different oxygen fluxes have been investigated using x-ray diffraction, x-ray photoelectron spectroscopy, and spectroscopic ellipsometry. Va...
- Tunable optical filters with nanostructured suspended gratings
[作者:Ye, JS; Kobayashi, T; Kanamori, Y; Hu, FR; Hane, K,期刊:Journal Of Vacuum Science & Technology B, 页码:1035-1038 , 文章类型: Article,,卷期:2009年27-3]
- In this article, the authors report a kind of nanostructured suspended grating (NSG), whose grating beams are connected with narrow mechanical springs at the center. Using an electrostatic comb drive actuator, the period...
- Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system
[作者:Li, YN; Li, W; Guo, T; Yan, ZD; Fu, X; Hu, XT,期刊:Journal Of Vacuum Science & Technology B, 页码:1288-1290 , 文章类型: Conference,,卷期:2009年27-3]
- The study of micropower supply has become a key issue in the development of wireless sensor networks using microelectromechanical system technology. Vibration-powered energy harvesting system is considered as a good sour...
- Strong exciton-photon coupling in ZnO based resonators
[作者:Sturm, C; Hilmer, H; Schmidt-Grund, R; Czekalla, C; Sellmann, J; Lenzner, J; Lorenz, M; Grundmann, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1726-1730 , 文章类型: Conference,,卷期:2009年27-3]
- The authors report on the fabrication of high quality all-oxide Bragg reflectors (BRs) and ZnO based resonators. The resonator consists of a bulk half-wavelength ZnO microcavity embedded between two BRs, each made of 10....
- Contrast reversal effect in scanning electron microscopy due to charging
[作者:Abe, H; Babin, S; Borisov, S; Hamaguchi, A; Kadowaki, M; Miyano, Y; Yamazaki, Y,期刊:Journal Of Vacuum Science & Technology B, 页码:1039-1042 , 文章类型: Conference,,卷期:2009年27-3]
- In semiconductor manufacturing, accurate measurement of shapes and sizes of fabricated features is required. These measurements are carried out using critical dimension scanning electron microscope (CD-SEM). Positions of...
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