- Getter free vacuum packaging for MEMS
[作者:Gan, ZY; Huang, DX; Wang, XF; Lin, D; Liu, S,期刊:Sensors And Actuators A-Physical, 页码:159-164 , 文章类型: Article,,卷期:2009年149-1]
- Quite a few MEMS devices such as accelerators, gyroscopes, infrared sensors need to work in vacuum environment to enhance their performance. The traditional vacuum packaging methods use getters to increase vacuum maintai...
- Limits to the integration of filters and lenses on thermoelectric IR detectors by flip-chip techniques
[作者:Fonollosa, J; Carmona, M; Santander, J; Fonseca, L; Moreno, M; Marco, S,期刊:Sensors And Actuators A-Physical, 页码:65-73 , 文章类型: Article,,卷期:2009年149-1]
- In the trend towards miniaturization, a detector module containing multiple IR sensor channels is being built and characterized. In its final form it contains thermopiles, narrow band filters and Fresnel lenses. An impor...
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