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  • Getter free vacuum packaging for MEMS
    [作者:Gan, ZY; Huang, DX; Wang, XF; Lin, D; Liu, S,期刊:Sensors And Actuators A-Physical, 页码:159-164 , 文章类型: Article,,卷期:2009年149-1]
  • Quite a few MEMS devices such as accelerators, gyroscopes, infrared sensors need to work in vacuum environment to enhance their performance. The traditional vacuum packaging methods use getters to increase vacuum maintai...