- A low temperature surface modification assisted method for bonding plastic substrates - art. no. 015007
[作者:Vlachopoulou, ME; Tserepi, A; Pavli, P; Argitis, P; Sanopoulou, M; Misiakos, K,期刊:Journal of Micromechanics and Microengineering, 页码:15007-15007 , 文章类型: Article,,卷期:2009年19-1]
- A low cost, low temperature process for sealing microfluidic devices composed of at least one organic polymeric substrate is presented. The process is based on the surface modification of the organic substrate by means o...
- Analysis, simulation and fabrication of MEMS springs for a micro-tensile system - art. no. 015027
[作者:Liu, R; Wang, H; Li, XP; Tang, J; Mao, SP; Ding, GF,期刊:Journal of Micromechanics and Microengineering, 页码:15027-15027 , 文章类型: Article,,卷期:2009年19-1]
- The support spring of a uniaxial micro-tensile system for testing micro-scale thin films is studied in this paper. Stresses of different shape springs are analyzed with the finite element method (FEM). The simulated resu...
- Analysis of vibration modes in a micromechanical square-plate resonator - art. no. 015028
[作者:Holmgren, O; Kokkonen, K; Veijola, T; Mattila, T; Kaajakari, V; Oja, A; Knuuttila, JV; Kaivola, M,期刊:Journal of Micromechanics and Microengineering, 页码:15028-15028 , 文章类型: Article,,卷期:2009年19-1]
- Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13....
- Fabrication of a micrometer Ni-Cu alloy column coupled with a Cu micro-column for thermal measurement - art. no. 015030
[作者:Lin, JC; Chang, TK; Yang, JH; Jeng, JH; Lee, DL; Jiang, SB,期刊:Journal of Micromechanics and Microengineering, 页码:15030-15030 , 文章类型: Article,,卷期:2009年19-1]
- Micrometer Ni-Cu alloy columns have been fabricated by the micro-anode-guided electroplating (MAGE) process in the citrate bath. The surface morphology and chemical composition of the micro-columns were determined by cop...
- Flexible Gd2O2S: Tb scintillators pixelated with polyethylene microstructures for digital x-ray image sensors - art. no. 015014
[作者:Jung, ID; Cho, MK; Lee, SM; Bae, KM; Jung, PG; Lee, CH; Lee, JM; Yun, S; Kim, HK; Kim, SS; Ko, JS,期刊:Journal of Micromechanics and Microengineering, 页码:15014-15014 , 文章类型: Article,,卷期:2009年19-1]
- Flexible scintillators for digital x-ray image sensors were designed, fabricated and characterized. In these scintillaotrs, terbium-doped gadolinium oxysulfide (Gd2O2S: Tb) scintillator pixels were embedded into a polyet...
- Packaging of silicon sensors for microfluidic bio-analytical applications - art. no. 015015
[作者:Wimberger-Friedl, R; Nellissen, T; Weekamp, W; van Delft, J; Ansems, W; Prins, M; Megens, M; Dittmer, W; de Witz, C; van Iersel, B,期刊:Journal of Micromechanics and Microengineering, 页码:15015-15015 , 文章类型: Article,,卷期:2009年19-1]
- A new industrial concept is presented for packaging biosensor chips in disposable microfluidic cartridges to enable medical diagnostic applications. The inorganic electronic substrates, such as silicon or glass, are inte...
- A resonant magnetic field microsensor with high quality factor at atmospheric pressure - art. no. 015016
[作者:Herrera-May, AL; Garcia-Ramirez, PJ; Aguilera-Cortes, LA; Martinez-Castillo, J; Sauceda-Carvajal, A; Garcia-Gonzalez, L; Figueras-Costa, E,期刊:Journal of Micromechanics and Microengineering, 页码:15016-15016 , 文章类型: Article,,卷期:2009年19-1]
- A resonant magnetic field microsensor with a high quality factor at atmospheric pressure has been designed, fabricated and tested. This microsensor does not require vacuum packaging to operate efficiently and presents a ...
- Investigation of ink transfer in a roller-reversal imprint process - art. no. 015033
[作者:Jiang, WT; Liu, HZ; Ding, YC; Tang, YP; Shi, YS; Yin, L; Lu, BH,期刊:Journal of Micromechanics and Microengineering, 页码:15033-15033 , 文章类型: Article,,卷期:2009年19-1]
- Roller imprint is considered as one of the processes suitable for patterning on a large-area flexible substrate, which is critical for macroelectronics manufacturing. In contrast to other published roller imprint process...
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