- Three-dimensional microfluidic mixers using ion beam lithography and micromachining
[作者:Palacios, E; Ocola, LE; Joshi-Imre, A; Bauerdick, S; Berse, M; Peto, L,期刊:Journal Of Vacuum Science & Technology B, 页码:C6I1-C6I6 , 文章类型: Article,,卷期:2010年28-6]
- In this article, the authors present microfluidic mixers containing three-dimensional (3D) geometries used to decrease mixing lengths in passive microfluidic systems. In order to create these 3D geometries, the authors u...
- Rotation speed control of Janus particles by dielectrophoresis in a microfluidic channel
[作者:Honegger, T; Lecarme, O; Berton, K; Peyrade, D,期刊:Journal Of Vacuum Science & Technology B, 页码:C6I14-C6I19 , 文章类型: Article,,卷期:2010年28-6]
- In this work, Janus particles (Au/fluorescent polystyrene) are fabricated and their flip/flop rotational effect is studied in a microfluidic channel thanks to dielectrophoresis, providing a new type of local light switch...
- Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching
[作者:Azimi, S; Mehran, M; Amini, A; Vali, A; Mohajerzadeh, S; Fathipour, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1125-1131 , 文章类型: Article,,卷期:2010年28-6]
- The authors report the realization of highly featured three-dimensional structures on silicon substrates with a single masking layer using a hydrogen-assisted deep reactive ion etching process. Oxygen, hydrogen, and SF6 ...
- Defect-free etching process for GaAs/AlGaAs hetero-nanostructure using chlorine/argon mixed neutral beam
[作者:Wang, XY; Huang, CH; Ohno, Y; Igarashi, M; Murayama, A; Samukawa, S,期刊:Journal Of Vacuum Science & Technology B, 页码:1138-1142 , 文章类型: Article,,卷期:2010年28-6]
- The authors studied a GaAs/Al0.3Ga0.7As hetero-nanostructure etching process, neutral beam (NB) etching with chlorine (Cl-2) and argon (Ar) mix gas. The effect of different mixing ratios of chlorine and argon has been in...
- Effect of Al doping on resistive switching behavior of NiOx films for nonvolatile memory application
[作者:Kim, J; Na, H; Oh, J; Ko, DH; Sohn, H,期刊:Journal Of Vacuum Science & Technology B, 页码:1143-1147 , 文章类型: Article,,卷期:2010年28-6]
- In this work, the authors investigated the effect of Al doping on the resistance switching characteristics of sputtered NiOx films. Pt/NiOx/Pt metal-insulator-metal (MIM) stacks were fabricated by reactive dc magnetron s...
- Reducing the pattern redundancy in optical proximity correction modeling by analyzing the pattern linearity
[作者:Li, JL; Zhang, L; Yan, QL; Melvin, LS; Lin, C; Su, E; Tang, N,期刊:Journal Of Vacuum Science & Technology B, 页码:C6J19-C6J24 , 文章类型: Article,,卷期:2010年28-6]
- In modern photolithography, optical proximity correction (OPC) has been widely adopted to improve the image fidelity of the mask on silicon wafer and, hence, improve the yield and the performance of integrated circuits. ...
- High accuracy electron beam model development in MICHELLE: eBEAM
[作者:Ovtchinnikov, SG; Cooke, SJ; Shtokhamer, R; Vlasov, AN; Mkrtchyan, MM; Kostas, C; Petillo, JJ; Levush, B,期刊:Journal Of Vacuum Science & Technology B, 页码:C6J8-C6J12 , 文章类型: Article,,卷期:2010年28-6]
- The authors present a new software tool (eBEAM) for high accuracy simulations of electron beams with stochastic space charge effects as a module of the SAIC/NRL MICHELLE particle simulation code. In modeling low current ...
- Fabrication of three-dimensional structures for the assessment of cell mechanical interactions within cell monolayers
[作者:Fuard, D; Moussus, M; Tomba, C; Peyrade, D; Nicolas, A,期刊:Journal Of Vacuum Science & Technology B, 页码:C6K1-C6K7 , 文章类型: Article,,卷期:2010年28-6]
- The measurement of the forces at play in cell/cell adhesion uses a cell monolayer plated onto two-dimensional substrate like arrays of elastomeric microfabricated pillars. Unfortunately, the few attempts that have been d...
- Gelatin/glycerol coating to preserve mechanically compliant nanowire electrodes from damage during brain implantation
[作者:Witteveen, JA; Suyatin, DB; Gallentoft, L; Schouenborg, J; Danielsen, N; Prinz, CN,期刊:Journal Of Vacuum Science & Technology B, 页码:C6K13-C6K16 , 文章类型: Article,,卷期:2010年28-6]
- Chronically implanted neural implants are of clinical importance. However, currently used electrodes have several drawbacks. Some weeks after implantation in the brain, a glial scar forms around the electrode, causing de...
- CO2 laser treatment for stabilization of the superhydrophobicity of carbon nanotube surfaces
[作者:Ramos, SC; Vasconcelos, G; Antunes, EF; Lobo, AO; Trava-Airoldi, VJ; Corat, EJ,期刊:Journal Of Vacuum Science & Technology B, 页码:1153-1157 , 文章类型: Article,,卷期:2010年28-6]
- In this work, the authors demonstrate the formation of stable superhydrophobic vertically aligned multiwalled carbon nanotube (VACNT) surfaces through CO2 laser irradiance, in which the contact angle value reached 161 de...
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