- Electrothermal actuation of silicon carbide ring resonators
[作者:Mastropaolo, E; Cheung, R; Henry, A; Janzen, E,期刊:Journal Of Vacuum Science & Technology B, 页码:3109-3114 , 文章类型: Article,,卷期:2009年27-6]
- Silicon carbide (SiC) ring resonators have been designed, simulated, and fabricated in order to achieve higher resonant frequency compared to beam resonators. The resonant frequency as a function of the ring radius and c...
- Gallium phosphide nanowire arrays and their possible application in cellular force investigations
[作者:Suyatin, DB; Hallstram, W; Samuelson, L; Montelius, L; Prinz, CN; Kanje, M,期刊:Journal Of Vacuum Science & Technology B, 页码:3092-3094 , 文章类型: Article,,卷期:2009年27-6]
- The authors report the fabrication of gallium phosphide nanowire arrays that can be used for cellular force measurements. The nanowire positions are defined using electron beam lithography and the nanowires are grown usi...
- In situ synthesis and direct immobilization of ssDNA on electron beam patterned hydrogen silsesquioxane
[作者:Negrete, OD; Onses, MS; Nealy, PF; Cerrina, F,期刊:Journal Of Vacuum Science & Technology B, 页码:3082-3087 , 文章类型: Article,,卷期:2009年27-6]
- In addition to being a high-resolution negative-tone electron beam resist, hydrogen silsesquioxane (HSQ) has chemical properties similar to glass, making it useful for integration with biodevice fabrication. The authors ...
- Preparation of diamond-shaped channels in SU-8 for optical control of the filling state
[作者:Mollenbeck, S; Bogdanski, N; Mayer, A; Scheer, HC; Zajadacz, J; Zimmer, K,期刊:Journal Of Vacuum Science & Technology B, 页码:3078-3081 , 文章类型: Article,,卷期:2009年27-6]
- To improve control during the filling of the channels of a microfluidic device with the fluid under investigation, a new concept is presented: channels with a diamond-shaped cross section. These channels easily allow one...
- Parallel proximal probe arrays with vertical interconnections
[作者:Sarov, Y; Frank, A; Ivanov, T; Zollner, JP; Ivanova, K; Volland, B; Rangelow, IW; Brogan, A; Wilson, R; Zawierucha, P; Zielony, M; Gotszalk, T; Nikolov, N; Zier, M; Schmidt, B; Kostic, I,期刊:Journal Of Vacuum Science & Technology B, 页码:3132-3138 , 文章类型: Article,,卷期:2009年27-6]
- This article presents the fabrication and the characteristics of 8x64, parallel, self-actuated, and independently addressable scanning proximal probes with through-silicon via interconnection passing completely through a...
- 190 nm excimer laser drilling of glass slices: Dependence of drilling rate and via hole shape on the diameter of the via hole
[作者:Chen, KH; Wu, WH; Chu, BH; Lo, CF; Lin, JS; Wang, YL; Chang, CY; Pearton, SJ; Ren, F,期刊:Journal Of Vacuum Science & Technology B, 页码:L42-L46 , 文章类型: Article,,卷期:2009年27-6]
- The authors have investigated the effect of the via hole diameter on the laser drilling rate of glass as well as the shape of the drilled via holes. An Ar-F-2 based 193 nm UV excimer laser was used in this study. The via...
- Investigation of the physical and electronic properties of indium doped zinc oxide nanofibers synthesized by electrospinning
[作者:Lotus, AF; Kang, YC; Ramsier, RD; Chase, GG,期刊:Journal Of Vacuum Science & Technology B, 页码:2331-2336 , 文章类型: Article,,卷期:2009年27-6]
- Nanostructured metal oxides and particularly nanofiber based materials can provide significant advances for the miniaturization of electronic, optoelectronic, photonic, sensor, and energy conversion devices with enhanced...
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