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  • Parallel proximal probe arrays with vertical interconnections
    [作者:Sarov, Y; Frank, A; Ivanov, T; Zollner, JP; Ivanova, K; Volland, B; Rangelow, IW; Brogan, A; Wilson, R; Zawierucha, P; Zielony, M; Gotszalk, T; Nikolov, N; Zier, M; Schmidt, B; Kostic, I,期刊:Journal Of Vacuum Science & Technology B, 页码:3132-3138 , 文章类型: Article,,卷期:2009年27-6]
  • This article presents the fabrication and the characteristics of 8x64, parallel, self-actuated, and independently addressable scanning proximal probes with through-silicon via interconnection passing completely through a...