- Method of improving the quality of nanopatterning in atomic image projection electron-beam lithography
[作者:Kim, HM; Lee, MH; Lee, HS; Wi, JS; Lim, K; Kim, KB,期刊:Journal Of Vacuum Science & Technology B, 页码:2553-2557 , 文章类型: Article,,卷期:2009年27-6]
- The authors demonstrated successful nanopatterning using a high resolution lattice image obtained by transmission electron microscopy (TEM) as a mask signal [H. S. Lee , Adv. Mater. (Weinheim, Ger.) 19, 4198 (2007)]. In ...
- Subwavelength grating structures with magnetic resonances at visible frequencies fabricated by nanoimprint lithography for large area applications
[作者:Kaplan, AF; Chen, YH; Kang, MG; Guo, LJ; Xu, T; Luo, XG,期刊:Journal Of Vacuum Science & Technology B, 页码:3175-3179 , 文章类型: Article,,卷期:2009年27-6]
- Transmission of TM-polarized light through a subwavelength metal-dielectric grating structure exhibits strong resonance in the visible range. Simulations by finite-difference time-domain and finite-element methods show t...
- Effects of visible light illumination on the conductance of Al/AlOx single-electron transistors
[作者:George, HC; Orlov, AO; Joyce, RA; Tang, Y; Snider, GL,期刊:Journal Of Vacuum Science & Technology B, 页码:3158-3163 , 文章类型: Article,,卷期:2009年27-6]
- This report presents a study of the effects of light illumination, from near infrared to blue, on the characteristics of Al/AlOx single-electron transistors (SETs) at low temperatures (0.3-4.2 K). Several effects on the ...
- Easy mask-mold fabrication for combined nanoimprint and photolithography
[作者:Schift, H; Spreu, C; Schleunitz, A; Gobrecht, J; Klukowska, A; Reuther, F; Gruetzner, G,期刊:Journal Of Vacuum Science & Technology B, 页码:2850-2853 , 文章类型: Article,,卷期:2009年27-6]
- Hybrid transparent working stamps with both a surface relief and absorbing mask pattern were fabricated by replicating nanostructures in an Ormostamp film on prepatterned glass substrates. By using a combined nanoimprint...
- Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching
[作者:Moldovan, N; Divan, R; Zeng, HJ; Carlisle, JA,期刊:Journal Of Vacuum Science & Technology B, 页码:3125-3131 , 文章类型: Article,,卷期:2009年27-6]
- Ultrasharp diamond tips make excellent atomic force microscopy probes, field emitters, and abrasive articles due to diamond's outstanding physical properties, i.e., hardness, low friction coefficient, low work function, ...
- Fabrication of novel digital optical spectrometer on chip
[作者:Babin, S; Peroz, C; Bugrov, A; Goltsov, A; Ivonin, I; Yankov, V; Dhuey, S; Cabrini, S; Kley, EB; Schmidt, H,期刊:Journal Of Vacuum Science & Technology B, 页码:3187-3191 , 文章类型: Article,,卷期:2009年27-6]
- A novel type of digital optical spectrometer on chip is proposed and first results of their fabrication and characterization are reported. The devices are based on computer-designed digital planar holograms which involve...
- Lateral-flow particle filtration and separation with multilayer microfluidic channels
[作者:Kim, HC; Park, J; Cho, Y; Park, H; Han, A; Cheng, X,期刊:Journal Of Vacuum Science & Technology B, 页码:3115-3119 , 文章类型: Article,,卷期:2009年27-6]
- Separating particles from a suspension and sorting particles into different size ranges are important to many chemical, biological, and bioengineering applications. In this article, a novel lateral-flow particle separati...
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