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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共151条记录   Homoepitaxy of ZnO on bulk and thin film substrates by low temperature metal organic chemical vapor deposition using tert-butanol [作者：Sartel, C; Sallet, V; Lusson, A; Haneche, N; Laroche, JM; Galtier, P; Rogers, DJ; Teherani, FH,期刊：Journal Of Vacuum Science & Technology B, 页码：1615-1619 , 文章类型： Conference，,卷期：2009年27-3] Homoepitaxial growths of ZnO were performed by low pressure metal organic chemical vapor deposition (MOCVD) on both bulk hydrothermal and thin film buffer layers of ZnO grown by pulsed laser deposition on c-sapphire subs... Structural anisotropy in a-MgxZn1-xO (0 <= x <= 0.33) films on r-sapphire [作者：Saraf, G; Siegrist, T; Lu, YC,期刊：Journal Of Vacuum Science & Technology B, 页码：1620-1624 , 文章类型： Conference，,卷期：2009年27-3] The a-plane MgxZn1-xO (0 <= x <= 0.25) films were grown on r-plane (0112) sapphire substrates using metal-organic chemical vapor deposition. Growth was done at temperatures from 520 degrees C, with a typical growth rate ... Growth and structural properties of ZnO films on (10-10) m-plane sapphire substrates by plasma-assisted molecular beam epitaxy [作者：Kim, JH; Han, SK; Hong, SI; Hong, SK; Lee, JW; Lee, JY; Song, JH; Park, JS; Yao, T,期刊：Journal Of Vacuum Science & Technology B, 页码：1625-1630 , 文章类型： Conference，,卷期：2009年27-3] Growth and structural properties of ZnO films on (10-10) m-plane sapphire substrates by plasma-assisted molecular beam epitaxy were studied. The ZnO films were grown at a wide range of growth temperature of 100-800 degre... Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C4F8- and CF4-based discharges [作者：Engelmann, S; Bruce, RL; Weilnboeck, F; Sumiya, M; Kwon, T; Phaneuf, R; Oehrlein, GS; Andes, C; Graves, D; Nest, D; Hudson, EA,期刊：Journal Of Vacuum Science & Technology B, 页码：1165-1179 , 文章类型： Article，,卷期：2009年27-3] The authors report a study of the impact of surface chemical factors on etch rates along with surface and line edge roughness introduction for prototypical photoresist (PR) materials and structures during plasma-based pa... Ion beam sputtering of Ta2O5 films on thermoplast substrates as waveguides for biosensors [作者：Kulisch, W; Gilliland, D; Ceccone, G; Sirghi, L; Rauscher, H; Gibson, PN; Zurn, M; Bretagnol, F; Rossi, F,期刊：Journal Of Vacuum Science & Technology B, 页码：1180-1190 , 文章类型： Article，,卷期：2009年27-3] Tantalum pentoxide thin films have been deposited at room temperature by (dual) ion beam sputtering for applications as waveguides in biosensors. The oxygen partial pressure and the energy of the substrate ion beam were ... Integrated microactuation scanning probe microscopy system [作者：Chen, X; Lee, DW,期刊：Journal Of Vacuum Science & Technology B, 页码：1408-1412 , 文章类型： Conference，,卷期：2009年27-3] This article reports on a highly integrated system that combines a scanning probe cantilever with an X-Y-Z scanner through monolithic microfabrication without any manual assembly or alignment for scanning probe microscop... Analysis on vibration rejection ratio of scanning probe microscope [作者：Chen, JP; Guo, T; Hu, XD; Hu, XT,期刊：Journal Of Vacuum Science & Technology B, 页码：1413-1417 , 文章类型： Conference，,卷期：2009年27-3] In order to investigate the influence of external vibration on the tip-sample interaction in scanning probe microscope, a concept, vibration rejection ratio (VRR), was proposed by Thompson In the present article, a conci... Framework for adaptive three-dimensional acquisition using structured light vision system [作者：Wang, P; Zhang, ZM; Sun, CK,期刊：Journal Of Vacuum Science & Technology B, 页码：1418-1421 , 文章类型： Conference，,卷期：2009年27-3] In order to reconstruct the viewable surface of an object completely and accurately using structured light vision system, one of the major problems is to determine the scanning path of structured light sensor before scan... Structural, electrical, and piezoelectric properties of ZnO films on SiC-6H substrates [作者：Chen, Y; Saraf, G; Reyes, PI; Duan, ZQ; Zhong, J; Lu, YC,期刊：Journal Of Vacuum Science & Technology B, 页码：1631-1634 , 文章类型： Conference，,卷期：2009年27-3] Epitaxial ZnO films were grown on c-plane SiC-6H substrates using metal-organic chemical vapor deposition. X-ray diffraction coupled theta-2 theta and phi-scans show that the n-type ZnO films have c-axis orientation and ... Effects of two-step growth by employing Zn-rich and O-rich growth conditions on properties of (1120) ZnO films grown by plasma-assisted molecular beam epitaxy on sapphire [作者：Han, SK; Kim, JG; Kim, JH; Hong, SK; Lee, JW; Lee, JY; Song, JH; Nam, YS; Chang, SK; Yao, T,期刊：Journal Of Vacuum Science & Technology B, 页码：1635-1640 , 文章类型： Conference，,卷期：2009年27-3] The authors report properties of a-plane ZnO films on r-plane sapphire substrates by plasma-assisted molecular beam epitaxy in which two-step growth is employed. They show that the two-step growth is effective in improvi... Effects of annealing in N-2 on sputtered Al-doped ZnO thin films [作者：Lennon, C; Kodama, R; Chang, Y; Sivananthan, S; Deshpande, M,期刊：Journal Of Vacuum Science & Technology B, 页码：1641-1645 , 文章类型： Conference，,卷期：2009年27-3] Transparent conductive oxides (TCOs) are a unique class of materials that exhibit both low electrical resistivity and high optical transmittance. Al-doped ZnO thin films have the potential to replace the widely used TCO ... Thermal imprint into thin polymer layers below the critical molecular weight [作者：Bogdanski, N; Wissen, M; Mollenbeck, S; Scheer, HC,期刊：Journal Of Vacuum Science & Technology B, 页码：1191-1194 , 文章类型： Conference，,卷期：2009年27-3] Imprints into thin thermoplastic layers in thermal imprint often go along with phenomena such as physical self-assembly and recovery, which impair the resulting replication quality. To avoid recovery, in particular withi... Commercial molecular beam epitaxy production of high quality SrTiO3 on large diameter Si substrates [作者：Gu, X; Lubyshev, D; Batzel, J; Fastenau, JM; Liu, WK; Pelzel, R; Magana, JF; Ma, Q; Wang, LP; Zhang, P; Rao, VR,期刊：Journal Of Vacuum Science & Technology B, 页码：1195-1199 , 文章类型： Article，,卷期：2009年27-3] The authors report on the development of a molecular beam epitaxy production process for the epitaxial growth of high quality, single crystal, single phase SrTiO3 (STO) films on Si substrates with diameter up to 8 in. Re... Use of the concept "area efficiency of emission" in equations describing field emission from large-area electron sources [作者：Forbes, RG,期刊：Journal Of Vacuum Science & Technology B, 页码：1200-1203 , 文章类型： Article，,卷期：2009年27-3] In the context of electron emission from surfaces, the area efficiency of emission (alpha) is defined as the ratio of the effective area of high-density emission (called the notional emission area) to the apparent area o... Multi-WO3 nanowire based gas detector [作者：Kang, SM; Battogtokh, J; McKeown, DA; Buechele, AC; Pegg, IL; Philip, J,期刊：Journal Of Vacuum Science & Technology B, 页码：1204-1206 , 文章类型： Article，,卷期：2009年27-3] The authors have grown high quality WO3 nanowires and fabricated devices with single and multiple nanowires. Devices with single WO3 nanowire exhibit n-type semiconducting behavior and the conductivity increases with hyd... Development of an integral optics system for a slim optical mouse in a slim portable electric device [作者：Woo, DK; Hane, K; Cho, SC; Lee, SK,期刊：Journal Of Vacuum Science & Technology B, 页码：1422-1427 , 文章类型： Conference，,卷期：2009年27-3] This paper presents the development of an integral optics system for a slim optical mouse whose operation principle in light propagation is based on total internal refection to prevent image distortion. The slim optical ...